Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741600 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Chung-Chieh Hsu, Chih-Kuo Chang, Chih-Ping Chen, Hsu-Shui Liu +3 more | 2017-08-22 |
| 9425077 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Yung-Kai Lin, Hsu-Shui Liu, Kai-Szu Lo, Chih-Ping Chen +3 more | 2016-08-23 |