Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741600 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Chung-Chieh Hsu, Chian-kun Chan, Chih-Kuo Chang, Chih-Ping Chen +3 more | 2017-08-22 |
| 9425077 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Hsu-Shui Liu, Kai-Szu Lo, Chih-Ping Chen, Chian-kun Chan +3 more | 2016-08-23 |
| 6576483 | Backside cannelure to provide for wafer shift detection | Ching-Hian Chou, Jean-Hur Yuen, Tsung-Chi Hsieh | 2003-06-10 |
| 5988526 | Combination nozzle and vacuum hood that is self cleaning | Chung-Hao Tzeng, Dong-Shiuh Cheng, Cherng-Yui Chang | 1999-11-23 |
| 5756155 | Combination nozzle and vacuum hood that is self cleaning | Chung-Hao Tzeng, Dong-Shiuh Cheng, Cherng-Yui Chang | 1998-05-26 |