Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12282318 | Semiconductor wafer cooling | Yung-Yao Lee, Cheng-Kang Hu, Hsu-Shui Liu | 2025-04-22 |
| 11768484 | Semiconductor wafer cooling | Yung-Yao Lee, Cheng-Kang Hu, Hsu-Shui Liu | 2023-09-26 |
| 11500299 | Exposure method and exposure apparatus | Yung-Yao Lee, Heng-Hsin Liu, Hung-Ming Kuo | 2022-11-15 |
| 11162777 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Chin-Hsiang Lin, Heng-Hsin Liu, Ho-Ping Chen | 2021-11-02 |
| 11153957 | Apparatus and method for generating an electromagnetic radiation | Tzu-Jeng Hsu, Chi-Ming Yang, Chyi Shyuan Chern, Heng-Hsin Liu, Chin-Hsiang Lin | 2021-10-19 |
| 10747128 | Exposure method and exposure apparatus | Yung-Yao Lee, Heng-Hsin Liu, Hung-Ming Kuo | 2020-08-18 |
| 10514247 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Chin-Hsiang Lin, Heng-Hsin Liu, Ho-Ping Chen | 2019-12-24 |
| 10061215 | Patterning method and patterning apparatus for fabricating a resist pattern | Yung-Yao Lee, Ho-Ping Chen, Heng-Hsin Liu | 2018-08-28 |
| 9978625 | Semiconductor method and associated apparatus | Yung-Yao Lee, Ho-Ping Chen, Heng-Hsin Liu | 2018-05-22 |
| 9863754 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Chin-Hsiang Lin, Heng-Hsin Liu, Ho Ping Cheng | 2018-01-09 |
| 9841687 | Synchronized integrated metrology for overlay-shift reduction | Yung-Yao Lee, Heng-Hsin Liu, Yung-Cheng Chen | 2017-12-12 |
| 9826615 | EUV collector with orientation to avoid contamination | Jian-Yuan Su, Hung-Ming Kuo, Kuo-Hung Chao | 2017-11-21 |
| 9781773 | Method of heating/cooling a substrate | Jacky Chung, Heng-Hsin Liu, Chun-Hung Lin | 2017-10-03 |
| 9709904 | Lithography apparatus having dual reticle edge masking assemblies and method of use | Tung-Li Wu, Chin-Hsiang Lin, Heng-Hsin Liu | 2017-07-18 |
| 9658536 | In-line inspection and clean for immersion lithography | Tung-Li Wu, Heng-Hsin Liu | 2017-05-23 |
| 9640487 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Chao-Hsiung Wang, Chin-Hsiang Lin, Heng-Hsin Liu, Ho-Ping Chen | 2017-05-02 |
| 9632426 | In-situ immersion hood cleaning | Heng-Jen Lee | 2017-04-25 |
| 9587929 | Focus metrology method and photolithography method and system | Hung-Ming Kuo, Heng-Hsin Liu, Yung-Yao Lee | 2017-03-07 |
| 9282592 | Rotatable heating-cooling plate and element in proximity thereto | Jacky Chung, Heng-Hsin Liu, Chun-Hung Lin | 2016-03-08 |
| 9228827 | Flexible wafer leveling design for various orientation of line/trench | Kuo-Hung Chao, Heng-Hsin Liu | 2016-01-05 |
| 9123583 | Overlay abnormality gating by Z data | Chun-Hsien Lin, Kuo-Hung Chao, Yi-Ping Hsieh, Yen-Di Tsen, Heng-Hsin Liu +1 more | 2015-09-01 |
| 9081297 | Lithography apparatus having dual reticle edge masking assemblies and method of use | Tung-Li Wu, Chin-Hsiang Lin, Heng-Hsin Liu | 2015-07-14 |
| 8955530 | System and method for cleaning a wafer chuck | Heng-Jen Lee | 2015-02-17 |
| 8616539 | Track spin wafer chuck | Wei-Hsiang Tseng, Kai-Fa Ho, Ho-Ping Chen, CHIA-YUN LEE | 2013-12-31 |
| 8338262 | Dual wavelength exposure method and system for semiconductor device manufacturing | Heng-Jen Lee, I-Hsiung Huang | 2012-12-25 |