Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9826615 | EUV collector with orientation to avoid contamination | Jian-Yuan Su, Hung-Ming Kuo, Jui-Chun Peng | 2017-11-21 |
| 9466101 | Detection of defects on wafer during semiconductor fabrication | Chun-Hsien Lin, Liu Bo-Tsun, Chin-Ti Ko, Wu Cheng-Hung, Peng Jui-Chun +3 more | 2016-10-11 |
| 9228827 | Flexible wafer leveling design for various orientation of line/trench | Heng-Hsin Liu, Jui-Chun Peng | 2016-01-05 |
| 9123583 | Overlay abnormality gating by Z data | Chun-Hsien Lin, Yi-Ping Hsieh, Yen-Di Tsen, Jui-Chun Peng, Heng-Hsin Liu +1 more | 2015-09-01 |
| 6309944 | Overlay matching method which eliminates alignment induced errors and optimizes lens matching | Han-Ming Sheng, Cheng-Chen Kuo, Chu-Wen Huang | 2001-10-30 |