Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734116 | Damascene method employing multi-layer etch stop layer | Cheng Guo, Dian-Hau Chen, Li-Kong Turn | 2004-05-11 |
| 6477265 | System to position defect location on production wafers | — | 2002-11-05 |
| 6344365 | Arc coating on mask quartz plate to avoid alignment error on stepper or scanner | Cheng-Chen Kuo | 2002-02-05 |
| 6330355 | Frame layout to monitor overlay performance of chip composed of multi-exposure images | Chia-Hsiang Chen, Chih-Chien Hung, Hsiang-Chung Liu, Chun-Mei Lee, De-Ming Liang +2 more | 2001-12-11 |
| 6309944 | Overlay matching method which eliminates alignment induced errors and optimizes lens matching | Cheng-Chen Kuo, Chu-Wen Huang, Kuo-Hung Chao | 2001-10-30 |
| 6252670 | Method for accurately calibrating a constant-angle reflection-interference spectrometer (CARIS) for measuring photoresist thickness | Ren-Jyh Leu | 2001-06-26 |