Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9814097 | Baking apparatus for priming substrate | Chien-Hung Wang, Shang-Wern Chang, Heng-Hsin Liu | 2017-11-07 |
| 6652912 | Method and system for spraying a viscous material on a wafer | Hung Chih Chen, Kun-I Lee, Bao-Ru Young | 2003-11-25 |
| 6531374 | Overlay shift correction for the deposition of epitaxial silicon layer and post-epitaxial silicon layers in a semiconductor device | Kun-I Lee, Tai-Yuan Wu, Hung Chih Chen | 2003-03-11 |
| 6252670 | Method for accurately calibrating a constant-angle reflection-interference spectrometer (CARIS) for measuring photoresist thickness | Han-Ming Sheng | 2001-06-26 |