Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500299 | Exposure method and exposure apparatus | Yung-Yao Lee, Heng-Hsin Liu, Jui-Chun Peng | 2022-11-15 |
| 10747128 | Exposure method and exposure apparatus | Yung-Yao Lee, Heng-Hsin Liu, Jui-Chun Peng | 2020-08-18 |
| 9826615 | EUV collector with orientation to avoid contamination | Jian-Yuan Su, Kuo-Hung Chao, Jui-Chun Peng | 2017-11-21 |
| 9587929 | Focus metrology method and photolithography method and system | Jui-Chun Peng, Heng-Hsin Liu, Yung-Yao Lee | 2017-03-07 |