Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, James Jeng-Jyi Hwang, Chi-Ming Yang, Yung-Yao Lee | 2020-12-29 |
| 10096482 | Apparatus and method for chemical mechanical polishing process control | Keung Hui, Jin-Ning Sung, Jong-I Mou, Soon-Kang Huang | 2018-10-09 |
| 9997420 | Method and/or system for chemical mechanical planarization (CMP) | Cheng Yen-Wei, Jong-I Mou | 2018-06-12 |
| 9733577 | Intra-field process control for lithography | Ai-Jen Hung, Chen-Yen Huang, Shin-Rung Lu | 2017-08-15 |
| 9588446 | Calibration apparatus and an adjustment method for a lithography apparatus | Chen-Yen Huang, Ai-Jen Hung, Shin-Rung Lu | 2017-03-07 |
| 9442392 | Scanner overlay correction system and method | Yi-Ping Hsieh, Chen-Yen Huang, Shin-Rung Lu, Jong-I Mou | 2016-09-13 |
| 9250619 | Systems and methods of automatic boundary control for semiconductor processes | Chih-Wei Hsu, Mei-Jen Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2016-02-02 |
| 9165843 | Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes | Jui-Long Chen, Hui-Yun Chao, Jong-I Mou | 2015-10-20 |
| 9158301 | Semiconductor processing dispatch control | Sunny Wu, Chun-Hsien Lin, Keung Hui, Jo Fei Wang, Jong-I Mou | 2015-10-13 |
| 9123583 | Overlay abnormality gating by Z data | Chun-Hsien Lin, Kuo-Hung Chao, Yi-Ping Hsieh, Jui-Chun Peng, Heng-Hsin Liu +1 more | 2015-09-01 |
| 9102033 | Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process | Keung Hui, Jin-Ning Sung, Huang Soon Kang, Jong-I Mou | 2015-08-11 |
| 9082661 | Scanner overlay correction system and method | Shin-Rung Lu, Jong-I Mou | 2015-07-14 |
| 9026239 | APC model extension using existing APC models | Po-Feng Tsai, Jo Fei Wang, Jong-I Mou | 2015-05-05 |
| 8938698 | Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes | Jui-Long Chen, Hui-Yun Chao, Jong-I Mou | 2015-01-20 |
| 8889434 | Scanner overlay correction system and method | Shin-Rung Lu, Jong-I Mou | 2014-11-18 |
| 8793638 | Method of optimizing design for manufacturing (DFM) | Keuing Hui, Yen-Wei Cheng, Jong-I Mou, Chin-Hsiang Lin | 2014-07-29 |
| 8781614 | Semiconductor processing dispatch control | Sunny Wu, Chun-Hsien Lin, Keung Hui, Jo Fei Wang, Jong-I Mou | 2014-07-15 |
| 8627251 | Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes | Jui-Long Chen, Hui-Yun Chao, Jong-I Mou | 2014-01-07 |
| 8549012 | Processing exception handling | Po-Feng Tsai, Jin-Ning Sung, Jo Fei Wang, Jong-I Mou | 2013-10-01 |
| 8406904 | Two-dimensional multi-products multi-tools advanced process control | Chih-Wei Hsu, Jong-I Mou | 2013-03-26 |
| 8295965 | Semiconductor processing dispatch control | Sunny Wu, Chun-Hsien Lin, Keung Hui, Jo Fei Wang, Jong-I Mou | 2012-10-23 |
| 8288063 | Defense system in advanced process control | Shin-Rung Lu, Chih-Ming Hong | 2012-10-16 |
| 8205173 | Physical failure analysis guiding methods | Sunny Wu, Monghsung Chuang, Fu-Min Huang, Jo Fei Wang, Jong-I Mou | 2012-06-19 |