Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100627 | Method and structure for metal gates | Tung-Huang Chen, Yen-Yu Chen, Po-An Chen | 2024-09-24 |
| 12020980 | Semiconductor structure and forming method thereof | Hsing-Chi Chen | 2024-06-25 |
| 11605566 | Method and structure for metal gates | Tung-Huang Chen, Yen-Yu Chen, Po-An Chen | 2023-03-14 |
| 11358252 | Method of using a polishing system | Shih-Chi Lin, Kun-Tai Wu, You-Hua Chou, Chih-Tsung Lee, Min Hao Hong +4 more | 2022-06-14 |
| 10668592 | Method of planarizing a wafer | Bo-I Lee, Chi-Ming Yang, Chin-Hsiang Lin | 2020-06-02 |
| 10513006 | High throughput CMP platform | Jiann Lih Wu, Jason Shen, James Jeng-Jyi Hwang, Chi-Ming Yang | 2019-12-24 |
| 10357867 | Polishing system | Shih-Chi Lin, Kun-Tai Wu, You-Hua Chou, Chih-Tsung Lee, Min Hao Hong +4 more | 2019-07-23 |
| 10096482 | Apparatus and method for chemical mechanical polishing process control | Keung Hui, Jin-Ning Sung, Jong-I Mou, Yen-Di Tsen | 2018-10-09 |
| 10090207 | Multi-point chemical mechanical polishing end point detection system and method of using | Jiann Lih Wu, Jeng-Jyi Hwang, Chi-Ming Yang | 2018-10-02 |
| 9718164 | Polishing system and polishing method | Shih-Chi Lin, Kun-Tai Wu, You-Hua Chou, Chih-Tsung Lee, Min Hao Hong +4 more | 2017-08-01 |
| 9368452 | Metal conductor chemical mechanical polish | Han-Hsin Kuo, Chi-Ming Yang, Shwang-Ming Jeng, Chin-Hsiang Lin | 2016-06-14 |
| 8188447 | Field-by-field laser annealing and feed forward process control | Chung-Ru Yang, Chyi Shyuan Chern | 2012-05-29 |
| 7957118 | Multi-zone electrostatic chuck and chucking method | YI-PIN CHANG, Tung Long Lai | 2011-06-07 |
| 7950983 | Retainer ring | Chih-Lung Lin, Chyi Shyuan Chern | 2011-05-31 |
| 7666068 | Retainer ring | Chih-Lung Lin, Chyi Shyuan Chern | 2010-02-23 |
| 7141495 | Methods and forming structures, structures and apparatuses for forming structures | SHUANG PENG, Chun-Hung Chen, Weng-Liang Fang | 2006-11-28 |
| 6821895 | Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP | Bih-Tiao Lin | 2004-11-23 |