Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062645 | Interconnect structure for semiconductor devices | Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai, Liang-Guang Chen | 2018-08-28 |
| 9723915 | Brush cleaning method | Fu-Ming Huang, Liang-Guang Chen, Chi-Ming Tsai, He Hui Peng | 2017-08-08 |
| 9679848 | Interconnect structure for semiconductor devices | Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai, Liang-Guang Chen | 2017-06-13 |
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Fu-Ming Huang, Shich-Chang Suen, Chi-Ming Tsai, Liang-Guang Chen | 2017-04-25 |
| 9460997 | Interconnect structure for semiconductor devices | Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai, Liang-Guang Chen | 2016-10-04 |
| 9370854 | Method of fabricating a semiconductor device, and chemical mechanical polish tool | Fu-Ming Huang | 2016-06-21 |
| 9368452 | Metal conductor chemical mechanical polish | Soon-Kang Huang, Chi-Ming Yang, Shwang-Ming Jeng, Chin-Hsiang Lin | 2016-06-14 |
| 9305880 | Interconnects for semiconductor devices | Fu-Ming Huang, Chi-Ming Tsai, Liang-Guang Chen | 2016-04-05 |
| 9252060 | Reduction of OCD measurement noise by way of metal via slots | Chi-Ming Tsai, Liang-Guang Chen, Fu-Ming Huang, Hao-Jen Liao, Ming-Chung Liang | 2016-02-02 |
| 9119464 | Brush cleaning system | Fu-Ming Huang, Liang-Guang Chen, Chi-Ming Tsai, He Hui Peng | 2015-09-01 |
| 8673783 | Metal conductor chemical mechanical polish | Huang Soon Kang, Chi-Ming Yang, Shwang-Ming Jeng, Chin-Hsiang Lin | 2014-03-18 |
| 8361900 | Barrier layer for copper interconnect | Shing-Chyang Pan, Chung-Chi Ko, Ching-Hua Hsieh | 2013-01-29 |
| 7091126 | Method for copper surface smoothing | Hung-Wen Su, Wen-Chih Chiou, Tsu Shih, Hsien-Ming Lee | 2006-08-15 |