Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297375 | Slurry composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Liang-Guang Chen, Kei-Wei Chen, Chun-Wei Hsu +6 more | 2025-05-13 |
| 12172263 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2024-12-24 |
| 12170195 | Post-CMP cleaning and apparatus | Liang-Guang Chen, Ting-Kui Chang, Chun-Chieh Lin | 2024-12-17 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2024-06-04 |
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Chun-Chieh Lin, Tsung-Hsien Chang +4 more | 2023-10-03 |
| 11728157 | Post-CMP cleaning and apparatus | Liang-Guang Chen, Ting-Kui Chang, Chun-Chieh Lin | 2023-08-15 |
| 11679469 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2023-06-20 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2023-05-23 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2022-11-22 |
| 11450565 | Ion implant process for defect elimination in metal layer planarization | Chia-Cheng Chen, Huicheng Chang, Kei-Wei Chen, Liang-Yin Chen, Tang-Kuei Chang +3 more | 2022-09-20 |
| 11322345 | Post-CMP cleaning and apparatus | Liang-Guang Chen, Ting-Kui Chang, Chun-Chieh Lin | 2022-05-03 |
| 10269555 | Post-CMP cleaning and apparatus | Liang-Guang Chen, Ting-Kui Chang, Chun-Chieh Lin | 2019-04-23 |
| 10062645 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Chi-Ming Tsai, Liang-Guang Chen | 2018-08-28 |
| 9962805 | Chemical mechanical polishing apparatus and method | Ting-Kui Chang, Liang-Guang Chen, Chun-Chieh Lin | 2018-05-08 |
| 9723915 | Brush cleaning method | Liang-Guang Chen, Han-Hsin Kuo, Chi-Ming Tsai, He Hui Peng | 2017-08-08 |
| 9679848 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Chi-Ming Tsai, Liang-Guang Chen | 2017-06-13 |
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Shich-Chang Suen, Han-Hsin Kuo, Chi-Ming Tsai, Liang-Guang Chen | 2017-04-25 |
| 9460997 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Chi-Ming Tsai, Liang-Guang Chen | 2016-10-04 |
| 9370854 | Method of fabricating a semiconductor device, and chemical mechanical polish tool | Han-Hsin Kuo | 2016-06-21 |
| 9305880 | Interconnects for semiconductor devices | Han-Hsin Kuo, Chi-Ming Tsai, Liang-Guang Chen | 2016-04-05 |
| 9252060 | Reduction of OCD measurement noise by way of metal via slots | Chi-Ming Tsai, Liang-Guang Chen, Han-Hsin Kuo, Hao-Jen Liao, Ming-Chung Liang | 2016-02-02 |
| 9119464 | Brush cleaning system | Liang-Guang Chen, Han-Hsin Kuo, Chi-Ming Tsai, He Hui Peng | 2015-09-01 |
| 5756024 | Method of manufacturing a biodegradable container | — | 1998-05-26 |