Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170195 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2024-12-17 |
| 12068195 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2024-08-20 |
| 12046506 | Devices with reduced capacitances | Yu-Hsin Chan, Cai-Ling Wu, Chang-Wen Chen, Po-Hsiang Huang, Yu-Yu Chen +3 more | 2024-07-23 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2024-06-04 |
| 11728157 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2023-08-15 |
| 11710659 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2023-07-25 |
| 11705324 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2023-07-18 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Fu-Ming Huang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2023-05-23 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2022-11-22 |
| 11322345 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2022-05-03 |
| 11211289 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2021-12-28 |
| 10998184 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2021-05-04 |
| 10643892 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2020-05-05 |
| 10325772 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2019-06-18 |
| 10269555 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2019-04-23 |
| 9962805 | Chemical mechanical polishing apparatus and method | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2018-05-08 |
| 9576789 | Apparatus, method, and composition for far edge wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2017-02-21 |