Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359090 | Composition and method for polishing and integrated circuit | Chi-Jen Liu, Chih-Chieh Chang, Kao-Feng Liao, Peng-Chung Jangjian, Chun-Wei Hsu +4 more | 2025-07-15 |
| 12297375 | Slurry composition and method for polishing and integrated circuit | Chi-Jen Liu, Liang-Guang Chen, Kei-Wei Chen, Chun-Wei Hsu, Li-Chieh Wu +6 more | 2025-05-13 |
| 12172263 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2024-12-24 |
| 12131944 | Slurry composition, semiconductor structure and method for forming the same | Chun-Wei Hsu, Chih-Chieh Chang, Yi-Sheng Lin, Jian-Ci Lin, Jeng-Chi Lin +4 more | 2024-10-29 |
| 12068169 | Semiconductor processing tool and methods of operation | Chih-Hung Chen, Liang-Guang Chen, Kei-Wei Chen | 2024-08-20 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2024-06-04 |
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin +4 more | 2023-10-03 |
| 11718812 | Post-CMP cleaning composition for germanium-containing substrate | William Weilun Hong, Gin-Chen Huang, Shich-Chang Suen, Kei-Wei Chen | 2023-08-08 |
| 11679469 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2023-06-20 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2023-05-23 |
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Matthew E. Carnes, Helin Huang | 2023-03-07 |
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin, Chyi Shyuan Chern +1 more | 2022-12-06 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2022-11-22 |
| 11450565 | Ion implant process for defect elimination in metal layer planarization | Chia-Cheng Chen, Huicheng Chang, Fu-Ming Huang, Kei-Wei Chen, Liang-Yin Chen +3 more | 2022-09-20 |
| 11260495 | Apparatus and methods for chemical mechanical polishing | Feng Yuan Hsu | 2022-03-01 |
| 11043151 | Surface treated abrasive particles for tungsten buff applications | Helin Huang, Kevin P. Dockery, Pankaj Kumar Singh, Hung-Tsung HUANG, Chih-Hsien Chien | 2021-06-22 |
| 10920107 | Self-stopping polishing composition and method for bulk oxide planarization | Alexander W. Hains, Juyeon Chang, Tina Li, Viet Lam, Sarah Brosnan +1 more | 2021-02-16 |
| 10639766 | Methods and compositions for processing dielectric substrate | Viet Lam | 2020-05-05 |
| 10619076 | Self-stopping polishing composition and method for bulk oxide planarization | Alexander W. Hains, Juyeon Chang, Tina Li, Viet Lam, Sarah Brosnan +1 more | 2020-04-14 |
| 10619075 | Self-stopping polishing composition and method for bulk oxide planarization | Alexander W. Hains, Juyeon Chang, Tina Li, Viet Lam, Sarah Brosnan +1 more | 2020-04-14 |
| 10522341 | Composition and method for removing residue from chemical-mechanical planarization substrate | Helin Huang | 2019-12-31 |
| 10029345 | Methods and compositions for processing dielectric substrate | Viet Lam | 2018-07-24 |
| 9188284 | Natural gas adsorption devices | Nie Luo, Lizhang Yang | 2015-11-17 |
| 8889096 | Reducing aluminosilicate scale in the bayer process | Timothy La, John D. Kildea, Kevin O'Brien, Everett C. Phillips, Kailas B. Sawant +2 more | 2014-11-18 |
| 8623766 | Composition and method for polishing aluminum semiconductor substrates | Steven Grumbine, Glenn Whitener, Chih-An Lin | 2014-01-07 |