Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418248 | Method of polishing group III-V materials | Benjamin Petro, William Ward | 2019-09-17 |
| 10294399 | Composition and method for polishing silicon carbide | Roman A. Ivanov, Fernando HUNG LOW, Cheng-Yuan KO | 2019-05-21 |
| 10066126 | Tungsten processing slurry with catalyst | Kevin P. Dockery, Helin Huang, Matthew E. Carnes | 2018-09-04 |
| 9944828 | Slurry for chemical mechanical polishing of cobalt | Elise Sikma, Witold Paw, Benjamin Petro, Jeffrey Cross | 2018-04-17 |
| 9566686 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2017-02-14 |
| 9303188 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-04-05 |
| 9303189 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-04-05 |
| 9303190 | Mixed abrasive tungsten CMP composition | William Ward, Steven Grumbine, Jeffrey Dysard | 2016-04-05 |
| 9238753 | CMP compositions selective for oxide and nitride with high removal rate and low defectivity | Brian Reiss | 2016-01-19 |
| 9238754 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-01-19 |
| 8778211 | GST CMP slurries | Matthias Stender, Chul Woo Nam | 2014-07-15 |
| 8623766 | Composition and method for polishing aluminum semiconductor substrates | Ji Cui, Steven Grumbine, Chih-An Lin | 2014-01-07 |