Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11034862 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, William Ward, Pankaj Kumar Singh | 2021-06-15 |
| 10508219 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, William Ward, Pankaj Kumar Singh | 2019-12-17 |
| 9803106 | Methods for fabricating a chemical-mechanical polishing composition | Steven Grumbine, Ernest Shen, Mary Cavanaugh, Daniel Clingerman | 2017-10-31 |
| 9617450 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, William Ward, Pankaj Kumar Singh | 2017-04-11 |
| 9566686 | Composition for tungsten CMP | Steven Grumbine, Lin Fu, William Ward, Glenn Whitener | 2017-02-14 |
| 9567491 | Tungsten chemical-mechanical polishing composition | Lin Fu, Steven Grumbine, Tina Li | 2017-02-14 |
| 9556363 | Copper barrier chemical-mechanical polishing composition | Lin Fu, Steven Grumbine, Wei Weng, Lei Liu, Alexei P. Leonov | 2017-01-31 |
| 9499721 | Colloidal silica chemical-mechanical polishing composition | Steven Grumbine, Ernest Shen, Mary Cavanaugh | 2016-11-22 |
| 9434859 | Chemical-mechanical planarization of polymer films | Sudeep Pallikkara Kuttiatoor, Renhe Jia | 2016-09-06 |
| 9422456 | Colloidal silica chemical-mechanical polishing composition | Steven Grumbine, Ernest Shen, Mary Cavanaugh | 2016-08-23 |
| 9422457 | Colloidal silica chemical-mechanical polishing concentrate | Steven Grumbine, Ernest Shen, Mary Cavanaugh | 2016-08-23 |
| 9340706 | Mixed abrasive polishing compositions | Brian Reiss, Jakub W. Nalaskowski, Viet Lam, Renhe Jia | 2016-05-17 |
| 9309442 | Composition for tungsten buffing | Lin Fu, Steven Grumbine | 2016-04-12 |
| 9303190 | Mixed abrasive tungsten CMP composition | William Ward, Glenn Whitener, Steven Grumbine | 2016-04-05 |
| 9303189 | Composition for tungsten CMP | Steven Grumbine, Lin Fu, William Ward, Glenn Whitener | 2016-04-05 |
| 9303188 | Composition for tungsten CMP | Steven Grumbine, Lin Fu, William Ward, Glenn Whitener | 2016-04-05 |
| 9281210 | Wet-process ceria compositions for polishing substrates, and methods related thereto | Brian Reiss, Sairam Shekhar | 2016-03-08 |
| 9238754 | Composition for tungsten CMP | Steven Grumbine, Lin Fu, William Ward, Glenn Whitener | 2016-01-19 |
| 9165489 | CMP compositions selective for oxide over polysilicon and nitride with high removal rate and low defectivity | Tina Li, Kevin P. Dockery, Renhe Jia | 2015-10-20 |
| 9127187 | Mixed abrasive tungsten CMP composition | Steven Grumbine | 2015-09-08 |
| 9028572 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, William Ward, Pankaj Kumar Singh | 2015-05-12 |
| 8906252 | CMP compositions selective for oxide and nitride with high removal rate and low defectivity | Kevin P. Dockery, Renhe Jia | 2014-12-09 |
| 8759216 | Compositions and methods for polishing silicon nitride materials | Sriram Anjur, Timothy Johns, Zhan Chen | 2014-06-24 |
| 8741009 | Polishing composition containing polyether amine | Paul M. Feeney, Sriram Anjur, Timothy Johns, Yun-Biao Xin, Li Xia Wang | 2014-06-03 |
| 8623767 | Method for polishing aluminum/copper and titanium in damascene structures | Vlasta Brusic, Christopher Thompson | 2014-01-07 |