| 9343330 |
Compositions for polishing aluminum/copper and titanium in damascene structures |
Renjie Zhou, Paul M. Feeney, Christopher Thompson |
2016-05-17 |
$8,405,000 |
| 8623767 |
Method for polishing aluminum/copper and titanium in damascene structures |
Christopher Thompson, Jeffrey Dysard |
2014-01-07 |
$8,457,000 |
| 8435421 |
Metal-passivating CMP compositions and methods |
Jason Keleher, Pankaj Kumar Singh |
2013-05-07 |
$4,797,000 |
| 8425797 |
Compositions for polishing aluminum/copper and titanium in damascene structures |
Christopher Thompson, Jeffrey Dysard |
2013-04-23 |
$7,249,000 |
| 8251777 |
Polishing slurry for aluminum and aluminum alloys |
Kevin Moeggenborg, John Clark, Jeffrey Gilliland, Stanley Lesiak, Susan Wilson |
2012-08-28 |
$4,727,000 |
| 8101093 |
Chemical-mechanical polishing composition and method for using the same |
Francesco De Rege Thesauro, Kevin Moeggenborg, Benjamin Bayer |
2012-01-24 |
$7,411,000 |
| 8062096 |
Use of CMP for aluminum mirror and solar cell fabrication |
Richard Jenkins, Christopher Thompson |
2011-11-22 |
$6,221,000 |
| 7998335 |
Controlled electrochemical polishing method |
Paul M. Feeney |
2011-08-16 |
$2,469,000 |
| 7368066 |
Gold CMP composition and method |
Renjie Zhou, Christopher Thompson |
2008-05-06 |
$15,427,000 |
| 7288021 |
Chemical-mechanical polishing of metals in an oxidized form |
Francesco De Rege Thesauro, Benjamin Bayer |
2007-10-30 |
$18,250,000 |
| 7265055 |
CMP of copper/ruthenium substrates |
Christopher Thompson, Renjie Zhou |
2007-09-04 |
$5,692,000 |
| 7161247 |
Polishing composition for noble metals |
Francesco De Rege Thesauro, Christopher Thompson, Benjamin Bayer |
2007-01-09 |
$8,335,000 |
| 7160807 |
CMP of noble metals |
Francesco De Rege Thesauro, Benjamin Bayer |
2007-01-09 |
$8,335,000 |
| 7097541 |
CMP method for noble metals |
Francesco DeRege Thesauro, Benjamin Bayer |
2006-08-29 |
$2,818,000 |
| 7004819 |
CMP systems and methods utilizing amine-containing polymers |
Kevin Moeggenborg, Isaac K. Cherian |
2006-02-28 |
$3,864,000 |
| 6853474 |
Process for fabricating optical switches |
Chris C. Yu |
2005-02-08 |
$2,990,000 |
| 6632377 |
Chemical-mechanical planarization of metallurgy |
Daniel C. Edelstein, Paul M. Feeney, William L. Guthrie, Mark A. Jaso, Frank B. Kaufman +4 more |
2003-10-14 |
$12,688,000 |
| 6527622 |
CMP method for noble metals |
Francesco M. De Rege, Kevin Moeggenborg, Isaac K. Cherian, Renjie Zhou |
2003-03-04 |
$3,631,000 |
| 6174606 |
Corrosion and dissolution protection of a conductive silver/polymer composite |
Judith Marie Roldan, Ravi F. Saraf |
2001-01-16 |
$36,198,000 |
| 6015509 |
Composition containing a polymer and conductive filler and use thereof |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
2000-01-18 |
$42,053,000 |
| 5997773 |
Method for providing discharge protection or shielding |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
1999-12-07 |
$33,125,000 |
| 5985458 |
Housing for electromagnetic interference shielding |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
1999-11-16 |
$28,261,000 |
| 5922466 |
Composite comprising a metal substrate and a corrosion protecting layer |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
1999-07-13 |
$29,937,000 |
| 5916486 |
Method for providing discharge protection or shielding |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
1999-06-29 |
$36,828,000 |
| 5776587 |
Electronic package comprising a substrate and a semiconductor device bonded thereto |
Marie Angelopoulos, Teresita O. Graham, Sampath Purushothaman, Ravi F. Saraf, Jane M. Shaw +2 more |
1998-07-07 |
$9,897,000 |
