Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343330 | Compositions for polishing aluminum/copper and titanium in damascene structures | Vlasta Brusic, Renjie Zhou, Christopher Thompson | 2016-05-17 |
| 8741009 | Polishing composition containing polyether amine | Jeffrey Dysard, Sriram Anjur, Timothy Johns, Yun-Biao Xin, Li Xia Wang | 2014-06-03 |
| 7998335 | Controlled electrochemical polishing method | Vlasta Brusic | 2011-08-16 |
| 7897061 | Compositions and methods for CMP of phase change alloys | Jeffrey Dysard, Sriram Anjur | 2011-03-01 |
| 7837888 | Composition and method for damascene CMP | Sriram Anjur, Jeffrey Dysard | 2010-11-23 |
| 7585340 | Polishing composition containing polyether amine | Jeffrey Dysard, Sriram Anjur, Timothy Johns, Yun-Biao Xin, Li Xia Wang | 2009-09-08 |
| 6841479 | Method of reducing in-trench smearing during polishing | Isaac K. Cherian, Kevin Moeggenborg | 2005-01-11 |
| 6726534 | Preequilibrium polishing method and system | Gregory Bogush, Jeffrey P. Chamberlain, Brian L. Mueller, David Schroeder, Alicia Walters | 2004-04-27 |
| 6632377 | Chemical-mechanical planarization of metallurgy | Vlasta Brusic, Daniel C. Edelstein, William L. Guthrie, Mark A. Jaso, Frank B. Kaufman +4 more | 2003-10-14 |
| 6503827 | Method of reducing planarization defects | Susan G. Bombardier, Robert M. Geffken, David V. Horak, Matthew J. Rutten | 2003-01-07 |
| 6495917 | Method and structure of column interconnect | John J. Ellis-Monaghan, Robert M. Geffken, Howard S. Landis, Rosemary A. Previti-Kelly, Bette L. Bergman Reuter +3 more | 2002-12-17 |
| 6426558 | Metallurgy for semiconductor devices | Jonathan D. Chapple-Sokol, Robert M. Geffken, David V. Horak, Mark P. Murray, Anthony K. Stamper | 2002-07-30 |
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Timothy C. Krywanczyk, Lawrence D. David, Matthew T. Tiersch, Eric J. White | 2002-03-12 |
| 6350393 | Use of CsOH in a dielectric CMP slurry | Alicia F. Francis, Brian L. Mueller, James A. Dirksen | 2002-02-26 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Mahadevaiyer Krishnan, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |
| 6294105 | Chemical mechanical polishing slurry and method for polishing metal/oxide layers | Timothy C. Krywanczyk, Lawrence D. David, Matthew T. Tiersch, Eric J. White | 2001-09-25 |
| 6007411 | Wafer carrier for chemical mechanical polishing | — | 1999-12-28 |