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Method of polishing or planarizing a substrate |
David W. Boldridge, Gautam S. Grover |
2005-03-29 |
| 6716755 |
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Mingming Fang, Brian L. Mueller |
2004-04-06 |
| 6527817 |
Composition and method for planarizing surfaces |
Mingming Fang, Brian L. Mueller |
2003-03-04 |
| 6432319 |
Method for improving the efficiency of absorption heat pumps using a crystallization-inhibiting additive |
Terry A. Ring |
2002-08-13 |
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Use of CsOH in a dielectric CMP slurry |
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2002-02-26 |
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Composition and method for planarizing surfaces |
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Composition and method for planarizing surfaces |
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| 6177025 |
Absorption heat pumps having improved efficiency using a crystallization-inhibiting additive |
Terry A. Ring |
2001-01-23 |