Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6984588 | Compositions for oxide CMP | Brian L. Mueller, Shumin Wang | 2006-01-10 |
| 6872328 | Method of polishing or planarizing a substrate | James A. Dirksen, David W. Boldridge | 2005-03-29 |
| 6689692 | Composition for oxide CMP | Brian L. Mueller, Shumin Wang | 2004-02-10 |
| 5759917 | Composition for oxide CMP | Brian L. Mueller | 1998-06-02 |