Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350393 | Use of CsOH in a dielectric CMP slurry | Brian L. Mueller, James A. Dirksen, Paul M. Feeney | 2002-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350393 | Use of CsOH in a dielectric CMP slurry | Brian L. Mueller, James A. Dirksen, Paul M. Feeney | 2002-02-26 |