Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11167980 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2021-11-09 |
| 10589992 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2020-03-17 |
| 10589991 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2020-03-17 |
| 10549987 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2020-02-04 |
| 10438803 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2019-10-08 |
| 10177000 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2019-01-08 |
| 10173889 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Christopher V. Jahnes, Anthony K. Stamper | 2019-01-08 |
| 9981842 | Micro-Electro-Mechanical System (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2018-05-29 |
| 9969613 | Method for forming micro-electro-mechanical system (MEMS) beam structure | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2018-05-15 |
| 9938137 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2018-04-10 |
| 9932222 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more | 2018-04-03 |
| 9708508 | Slurry for chemical-mechanical polishing of metals and use thereof | Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch +1 more | 2017-07-18 |
| 9691623 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2017-06-27 |
| 9620371 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2017-04-11 |
| 9613853 | Copper wire and dielectric with air gaps | Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson | 2017-04-04 |
| 9478427 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2016-10-25 |
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more | 2016-08-02 |
| 9390969 | Integrated circuit and interconnect, and method of fabricating same | David A. DeMuynck, Zhong-Xiang He, Daniel R. Miga, Matthew D. Moon, Daniel S. Vanslette | 2016-07-12 |
| 9312140 | Semiconductor structures having low resistance paths throughout a wafer | Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper | 2016-04-12 |
| 9269666 | Methods for selective reverse mask planarization and interconnect structures formed thereby | Zhong-Xiang He, Anthony K. Stamper | 2016-02-23 |
| 9230914 | Copper wire and dielectric with air gaps | Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson | 2016-01-05 |
| 9159671 | Copper wire and dielectric with air gaps | Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson | 2015-10-13 |
| 9087839 | Semiconductor structures with metal lines | Shawn A. Adderly, Daniel A. Delibac, Zhong-Xiang He, Matthew D. Moon, Anthony C. Speranza +2 more | 2015-07-21 |
| 9057004 | Slurry for chemical-mechanical polishing of metals and use thereof | Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch +1 more | 2015-06-16 |
| 8956903 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Christopher V. Jahnes, Anthony K. Stamper | 2015-02-17 |