| 11167980 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2021-11-09 |
$5,376,000 |
| 10589992 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2020-03-17 |
$1,423,000 |
| 10589991 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2020-03-17 |
$1,423,000 |
| 10549987 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2020-02-04 |
$2,135,000 |
| 10438803 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2019-10-08 |
$4,743,000 |
| 10177000 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2019-01-08 |
$2,287,000 |
| 10173889 |
Planar cavity MEMS and related structures, methods of manufacture and design structures |
Russell T. Herrin, Christopher V. Jahnes, Anthony K. Stamper |
2019-01-08 |
$16,909,000 |
| 9981842 |
Micro-Electro-Mechanical System (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2018-05-29 |
$2,015,000 |
| 9969613 |
Method for forming micro-electro-mechanical system (MEMS) beam structure |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2018-05-15 |
$2,944,000 |
| 9938137 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2018-04-10 |
$2,135,000 |
| 9932222 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy +1 more |
2018-04-03 |
$2,801,000 |
| 9708508 |
Slurry for chemical-mechanical polishing of metals and use thereof |
Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch +1 more |
2017-07-18 |
$11,753,000 |
| 9691623 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2017-06-27 |
$2,603,000 |
| 9620371 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2017-04-11 |
$2,654,000 |
| 9613853 |
Copper wire and dielectric with air gaps |
Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson |
2017-04-04 |
$2,713,000 |
| 9478427 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2016-10-25 |
$7,053,000 |
| 9406472 |
Planar cavity MEMS and related structures, methods of manufacture and design structures |
Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more |
2016-08-02 |
$3,259,000 |
| 9390969 |
Integrated circuit and interconnect, and method of fabricating same |
David A. DeMuynck, Zhong-Xiang He, Daniel R. Miga, Matthew D. Moon, Daniel S. Vanslette |
2016-07-12 |
$2,207,000 |
| 9312140 |
Semiconductor structures having low resistance paths throughout a wafer |
Jeffrey P. Gambino, Thomas J. Hartswick, Zhong-Xiang He, Anthony K. Stamper |
2016-04-12 |
$2,843,000 |
| 9269666 |
Methods for selective reverse mask planarization and interconnect structures formed thereby |
Zhong-Xiang He, Anthony K. Stamper |
2016-02-23 |
$655,000 |
| 9230914 |
Copper wire and dielectric with air gaps |
Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson |
2016-01-05 |
$2,535,000 |
| 9159671 |
Copper wire and dielectric with air gaps |
Fen Chen, Jeffrey P. Gambino, Zhong-Xiang He, Trevor A. Thompson |
2015-10-13 |
$3,494,000 |
| 9087839 |
Semiconductor structures with metal lines |
Shawn A. Adderly, Daniel A. Delibac, Zhong-Xiang He, Matthew D. Moon, Anthony C. Speranza +2 more |
2015-07-21 |
$2,242,000 |
| 9057004 |
Slurry for chemical-mechanical polishing of metals and use thereof |
Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch +1 more |
2015-06-16 |
$2,098,000 |
| 8956903 |
Planar cavity MEMS and related structures, methods of manufacture and design structures |
Russell T. Herrin, Christopher V. Jahnes, Anthony K. Stamper |
2015-02-17 |
$5,211,000 |
