| 12381129 |
Liner-free through-silicon-vias formed by selective metal deposition |
David B. Thomas, Cody Soule, John G. Twombly, Bruce W. Porth, Vivekanand Kalaparthi |
2025-08-05 |
|
| 11167980 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2021-11-09 |
$5,376,000 |
| 10589991 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2020-03-17 |
$1,423,000 |
| 10589992 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2020-03-17 |
$1,423,000 |
| 10549987 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2020-02-04 |
$2,135,000 |
| 9981842 |
Micro-Electro-Mechanical System (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2018-05-29 |
$2,015,000 |
| 9969613 |
Method for forming micro-electro-mechanical system (MEMS) beam structure |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2018-05-15 |
$2,944,000 |
| 9938137 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2018-04-10 |
$2,135,000 |
| 9932222 |
Micro-electro-mechanical system (MEMS) structures and design structures |
Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more |
2018-04-03 |
$2,801,000 |
| 9708508 |
Slurry for chemical-mechanical polishing of metals and use thereof |
Graham M. Bates, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch, Eva A. Shah +1 more |
2017-07-18 |
$11,753,000 |
| 9057004 |
Slurry for chemical-mechanical polishing of metals and use thereof |
Graham M. Bates, Joseph K. V. Comeau, Jason P. Ritter, Matthew T. Tiersch, Eva A. Shah +1 more |
2015-06-16 |
$2,098,000 |
| 8734665 |
Slurry for chemical-mechanical polishing of copper and use thereof |
Graham M. Bates, Joseph K. V. Comeau, Jason P. Ritter, Eva A. Shah, Matthew T. Tiersch +1 more |
2014-05-27 |
$4,024,000 |
| 6812193 |
Slurry for mechanical polishing (CMP) of metals and use thereof |
Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis, Scott A. Estes +9 more |
2004-11-02 |
$9,962,000 |
