Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236580 | Copper contamination detection method and system for monitoring copper contamination | Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more | 2012-08-07 |
| 7957917 | Copper contamination detection method and system for monitoring copper contamination | Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more | 2011-06-07 |
| 7888142 | Copper contamination detection method and system for monitoring copper contamination | Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more | 2011-02-15 |
| 7855130 | Corrosion inhibitor additives to prevent semiconductor device bond-pad corrosion during wafer dicing operations | Robert R Cadieux, Timothy C. Krywanczyk | 2010-12-21 |
| 7332054 | Etch apparatus | Arne Ballantine, Emily E. Fisch, Gary L. Milo, Ronald A. Warren | 2008-02-19 |
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more | 2004-11-02 |
| 6758912 | Method of inhibiting contaminants using dilute acid rinse | Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner | 2004-07-06 |
| 6699400 | Etch process and apparatus therefor | Arne Ballantine, Emily E. Fisch, Gary L. Milo, Ronald A. Warren | 2004-03-02 |
| 6494966 | Method of minimizing contaminating deposits using dilute acid rinse | Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner | 2002-12-17 |
| 6191085 | Method for cleaning semiconductor devices | Emanuel I. Cooper, Glenn W. Gale, Rangarajan Jagannathan, Harald Okorn-Schmidt, David L. Rath | 2001-02-20 |
| 6162565 | Dilute acid rinse after develop for chrome etch | Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner | 2000-12-19 |
| 5962384 | Method for cleaning semiconductor devices | Emanuel I. Cooper, Glenn W. Gale, Rangarajan Jagannathan, Harald Okorn-Schmidt, David L. Rath | 1999-10-05 |
| 5459001 | Low stress electrodeposition of gold for x-ray mask fabrication | Thomas B. Faure, Steven C. Nash | 1995-10-17 |
| 5318687 | Low stress electrodeposition of gold for X-ray mask fabrication | Thomas B. Faure, Steven C. Nash | 1994-06-07 |