Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953831 | Device structures with multiple nitrided layers | Steven M. Shank, Randall Brault, John J. Ellis-Monaghan | 2018-04-24 |
| 8912091 | Backside metal ground plane with improved metal adhesion and design structures | Damyon L. Corbin, George A. Dunbar, III, Jeffrey P. Gambino, John C. Hall, Kenneth F. McAvey, Jr. +2 more | 2014-12-16 |
| 8758962 | Method and apparatus for sub-pellicle defect reduction on photomasks | Frances Anne Houle, Louis M. Kindt | 2014-06-24 |
| 8709887 | Method for fabricating a nitrided silicon-oxide gate dielectric | James S. Nakos, James J. Quinlivan, Bernie Roque, Steven M. Shank, Beth Ward | 2014-04-29 |
| 8236580 | Copper contamination detection method and system for monitoring copper contamination | Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more | 2012-08-07 |
| 8173331 | Method and apparatus for sub-pellicle defect reduction on photomasks | Frances Anne Houle, Louis M. Kindt | 2012-05-08 |
| 7957917 | Copper contamination detection method and system for monitoring copper contamination | Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more | 2011-06-07 |
| 7888142 | Copper contamination detection method and system for monitoring copper contamination | Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more | 2011-02-15 |
| 7759260 | Selective nitridation of gate oxides | John J. Ellis-Monaghan, James S. Nakos, James J. Quinlivan | 2010-07-20 |
| 7737050 | Method of fabricating a nitrided silicon oxide gate dielectric layer | Edward D. Adams, Evgeni Gousev, James S. Nakos, Heather Elizabeth Preuss, Joseph F. Shepard, Jr. | 2010-06-15 |
| 7342290 | Semiconductor metal contamination reduction for ultra-thin gate dielectrics | James R. Elliott, Kenneth R. Gault, Mousa H. Ishaq, Steven M. Shank, Mary A. St. Lawrence | 2008-03-11 |
| 7291568 | Method for fabricating a nitrided silicon-oxide gate dielectric | James S. Nakos, James J. Quinlivan, Bernie Roque, Steven M. Shank, Beth Ward | 2007-11-06 |
| 7138691 | Selective nitridation of gate oxides | John J. Ellis-Monaghan, James S. Nakos, James J. Quinlivan | 2006-11-21 |
| 6909157 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | James S. Nakos, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2005-06-21 |
| 6838396 | Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reduction | James R. Elliott, Kenneth R. Gault, Mousa H. Ishaq, Steven M. Shank, Mary A. St. Lawrence | 2005-01-04 |
| 6780720 | Method for fabricating a nitrided silicon-oxide gate dielectric | Anthony I. Chou, Toshiharu Furukawa, Margaret L. Gibson, James S. Nakos, Steven M. Shank | 2004-08-24 |
| 6770501 | Deuterium reservoirs and ingress paths | Eduard A. Cartier, Thomas G. Ference, Steven W. Mittl, Anthony K. Stamper | 2004-08-03 |
| 6706644 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | James S. Nakos, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2004-03-16 |
| 6521977 | Deuterium reservoirs and ingress paths | Eduard A. Cartier, Thomas G. Ference, Steven W. Mittl, Anthony K. Stamper | 2003-02-18 |
| 5947053 | Wear-through detector for multilayered parts and methods of using same | Harold G. Linde, Nicholas Mone, Jr., Ronald A. Warren | 1999-09-07 |