| 9953831 |
Device structures with multiple nitrided layers |
Steven M. Shank, Randall Brault, John J. Ellis-Monaghan |
2018-04-24 |
$8,335,000 |
| 8912091 |
Backside metal ground plane with improved metal adhesion and design structures |
Damyon L. Corbin, George A. Dunbar, III, Jeffrey P. Gambino, John C. Hall, Kenneth F. McAvey, Jr. +2 more |
2014-12-16 |
$3,695,000 |
| 8758962 |
Method and apparatus for sub-pellicle defect reduction on photomasks |
Frances Anne Houle, Louis M. Kindt |
2014-06-24 |
$6,231,000 |
| 8709887 |
Method for fabricating a nitrided silicon-oxide gate dielectric |
James S. Nakos, James J. Quinlivan, Bernie Roque, Steven M. Shank, Beth Ward |
2014-04-29 |
$5,775,000 |
| 8236580 |
Copper contamination detection method and system for monitoring copper contamination |
Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more |
2012-08-07 |
$7,112,000 |
| 8173331 |
Method and apparatus for sub-pellicle defect reduction on photomasks |
Frances Anne Houle, Louis M. Kindt |
2012-05-08 |
$8,171,000 |
| 7957917 |
Copper contamination detection method and system for monitoring copper contamination |
Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more |
2011-06-07 |
$3,978,000 |
| 7888142 |
Copper contamination detection method and system for monitoring copper contamination |
Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, Scott A. Estes, James S. Nakos +1 more |
2011-02-15 |
$3,434,000 |
| 7759260 |
Selective nitridation of gate oxides |
John J. Ellis-Monaghan, James S. Nakos, James J. Quinlivan |
2010-07-20 |
$3,139,000 |
| 7737050 |
Method of fabricating a nitrided silicon oxide gate dielectric layer |
Edward D. Adams, Evgeni Gousev, James S. Nakos, Heather Elizabeth Preuss, Joseph F. Shepard, Jr. |
2010-06-15 |
$4,416,000 |
| 7342290 |
Semiconductor metal contamination reduction for ultra-thin gate dielectrics |
James R. Elliott, Kenneth R. Gault, Mousa H. Ishaq, Steven M. Shank, Mary A. St. Lawrence |
2008-03-11 |
$9,920,000 |
| 7291568 |
Method for fabricating a nitrided silicon-oxide gate dielectric |
James S. Nakos, James J. Quinlivan, Bernie Roque, Steven M. Shank, Beth Ward |
2007-11-06 |
$19,194,000 |
| 7138691 |
Selective nitridation of gate oxides |
John J. Ellis-Monaghan, James S. Nakos, James J. Quinlivan |
2006-11-21 |
$6,127,000 |
| 6909157 |
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors |
James S. Nakos, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward |
2005-06-21 |
$6,933,000 |
| 6838396 |
Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reduction |
James R. Elliott, Kenneth R. Gault, Mousa H. Ishaq, Steven M. Shank, Mary A. St. Lawrence |
2005-01-04 |
$10,543,000 |
| 6780720 |
Method for fabricating a nitrided silicon-oxide gate dielectric |
Anthony I. Chou, Toshiharu Furukawa, Margaret L. Gibson, James S. Nakos, Steven M. Shank |
2004-08-24 |
$9,549,000 |
| 6770501 |
Deuterium reservoirs and ingress paths |
Eduard A. Cartier, Thomas G. Ference, Steven W. Mittl, Anthony K. Stamper |
2004-08-03 |
$6,296,000 |
| 6706644 |
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors |
James S. Nakos, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward |
2004-03-16 |
$17,709,000 |
| 6521977 |
Deuterium reservoirs and ingress paths |
Eduard A. Cartier, Thomas G. Ference, Steven W. Mittl, Anthony K. Stamper |
2003-02-18 |
$14,090,000 |
| 5947053 |
Wear-through detector for multilayered parts and methods of using same |
Harold G. Linde, Nicholas Mone, Jr., Ronald A. Warren |
1999-09-07 |
$30,723,000 |
