Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143953 | Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3 | Robert L. Sandstrom, Peter H. Bartlau, Thomas B. Faure, Supratik Guha, Edward W. Kiewra +1 more | 2021-10-12 |
| 8758962 | Method and apparatus for sub-pellicle defect reduction on photomasks | Jay Burnham, Frances Anne Houle | 2014-06-24 |
| 8173331 | Method and apparatus for sub-pellicle defect reduction on photomasks | Jay Burnham, Frances Anne Houle | 2012-05-08 |
| 7826038 | Method for adjusting lithographic mask flatness using thermally induced pellicle stress | Emily Gallagher, James A. Slinkman, Richard E. Wistron | 2010-11-02 |
| 7537114 | System and method for storing and transporting photomasks in fluid | Emily Gallagher | 2009-05-26 |
| 7355680 | Method for adjusting lithographic mask flatness using thermally induced pellicle stress | Emily Gallagher, James A. Slinkman, Richard Wistrom | 2008-04-08 |
| 7198276 | Adaptive electrostatic pin chuck | Brian N. Caldwell, Raymond W. Jeffer | 2007-04-03 |
| 7198872 | Light scattering EUVL mask | Emily Gallagher, Carey Thiel | 2007-04-03 |
| 7132206 | Process and apparatus for minimizing thermal gradients across an advanced lithographic mask | — | 2006-11-07 |
| 7049035 | Method for controlling linewidth in advanced lithography masks using electrochemistry | Carey Thiel | 2006-05-23 |
| 6777137 | EUVL mask structure and method of formation | Emily E. Fisch, James P. Levin, Michael R. Schmidt, Carey T. Williams | 2004-08-17 |