Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7826038 | Method for adjusting lithographic mask flatness using thermally induced pellicle stress | Emily Gallagher, Louis M. Kindt, James A. Slinkman | 2010-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7826038 | Method for adjusting lithographic mask flatness using thermally induced pellicle stress | Emily Gallagher, Louis M. Kindt, James A. Slinkman | 2010-11-02 |