Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10168612 | Photomask blank including a thin chromium hardmask | — | 2019-01-01 |
| 9964847 | Mask substrate structure | Mark S. Lawliss, A. Gary Reid | 2018-05-08 |
| 7355680 | Method for adjusting lithographic mask flatness using thermally induced pellicle stress | Emily Gallagher, Louis M. Kindt, James A. Slinkman | 2008-04-08 |
| 6989105 | Detection of hardmask removal using a selective etch | Jeffrey P. Gambino, Anthony K. Stamper | 2006-01-24 |
| 6391661 | Semiconductor and method of fabricating | Daniel S. Brooks, Phillip F. Chapman, John Cronin | 2002-05-21 |
| 6229155 | Semiconductor and method of fabricating | Daniel S. Brooks, Phillip F. Chapman, John Cronin | 2001-05-08 |