Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996000 | Test pattern layout for test photomask and method for evaluating critical dimension changes | Brian N. Caldwell, Yuki Fujita, Raymond W. Jeffer, Joseph L. Malenfant, Jr., Steven C. Nash | 2018-06-12 |
| 9989843 | Test pattern layout for test photomask and method for evaluating critical dimension changes | Brian N. Caldwell, Yuki Fujita, Raymond W. Jeffer, Joseph L. Malenfant, Jr., Steven C. Nash | 2018-06-05 |
| 9372394 | Test pattern layout for test photomask and method for evaluating critical dimension changes | Brian N. Caldwell, Yuki Fujita, Raymond W. Jeffer, Joseph L. Malenfant, Jr., Steven C. Nash | 2016-06-21 |
| 7754394 | Method to etch chrome for photomask fabrication | Shaun Crawford, Thomas B. Faure, Cuc K. Huynh | 2010-07-13 |
| 6777137 | EUVL mask structure and method of formation | Emily E. Fisch, Louis M. Kindt, Michael R. Schmidt, Carey T. Williams | 2004-08-17 |
| 6426177 | Single component developer for use with ghost exposure | Thomas B. Faure, Steven Flanders, Lyndon S. Gibbs, Harold G. Linde, Joseph L. Malenfant, Jr. +1 more | 2002-07-30 |
| 6270949 | Single component developer for copolymer resists | Thomas B. Faure, Steven Flanders, Harold G. Linde, Jeffrey F. Shepard | 2001-08-07 |
| 5159170 | Grid structure for reducing current density in focussed ion beam | Alfred Wagner | 1992-10-27 |
| 5149974 | Gas delivery for ion beam deposition and etching | Steven J. Kirch, Alfred Wagner | 1992-09-22 |
| 4388386 | Mask set mismatch | Bruce Dale King | 1983-06-14 |