| 7332054 |
Etch apparatus |
Arne Ballantine, Scott A. Estes, Emily E. Fisch, Gary L. Milo |
2008-02-19 |
| 6759260 |
Metal oxide temperature monitor |
Arne Ballantine, Edward C. Cooney, III, Jeffrey D. Gilbert, Robert G. Miller, Amy L. Myrick |
2004-07-06 |
| 6699400 |
Etch process and apparatus therefor |
Arne Ballantine, Scott A. Estes, Emily E. Fisch, Gary L. Milo |
2004-03-02 |
| 6580140 |
Metal oxide temperature monitor |
Arne Ballantine, Edward C. Cooney, III, Jeffrey D. Gilbert, Robert G. Miller, Amy L. Myrick |
2003-06-17 |
| 6339022 |
Method of annealing copper metallurgy |
Arne Ballantine, Edward C. Cooney, III, George A. Dunbar, III, Cheryl G. Faltermeier, Jeffrey D. Gilbert +9 more |
2002-01-15 |
| 6282459 |
Structure and method for detection of physical interference during transport of an article |
Arne Ballantine, Emily E. Fisch |
2001-08-28 |
| 6105274 |
Cryogenic/phase change cooling for rapid thermal process systems |
Arne Ballantine |
2000-08-22 |
| 6036821 |
Enhanced collimated sputtering apparatus and its method of use |
— |
2000-03-14 |
| 5982225 |
Hot electron compensation for improved MOS transistor reliability |
Timothy E. Forhan, Terence B. Hook, Steven W. Mittl, Edward J. Nowak, Madhu Sayala |
1999-11-09 |
| 5947053 |
Wear-through detector for multilayered parts and methods of using same |
Jay Burnham, Harold G. Linde, Nicholas Mone, Jr. |
1999-09-07 |
| 5943594 |
Method for extended ion implanter source lifetime with control mechanism |
Michael Bailey |
1999-08-24 |
| 5940724 |
Method for extended ion implanter source lifetime |
— |
1999-08-17 |
| 5579792 |
Apparatus for uniform cleaning of wafers using megasonic energy |
David Stanasolovich, William A. Syverson |
1996-12-03 |
| 5539080 |
Polyimide and a semiconductor prepared therefrom |
Dennis P. Hogan, Harold G. Linde |
1996-07-23 |
| 5536792 |
Antireflective polymide dielectric for photolithography |
Dennis P. Hogan, Harold G. Linde |
1996-07-16 |
| 5533540 |
Apparatus for uniform cleaning of wafers using megasonic energy |
David Stanasolovich, William A. Syverson |
1996-07-09 |
| 5441797 |
Antireflective polyimide dielectric for photolithography |
Dennis P. Hogan, Harold G. Linde |
1995-08-15 |
| 5427622 |
Method for uniform cleaning of wafers using megasonic energy |
David Stanasolovich, William A. Syverson |
1995-06-27 |
| 5397684 |
Antireflective polyimide dielectric for photolithography |
Dennis P. Hogan, Harold G. Linde |
1995-03-14 |
| 5352927 |
Self-aligned contact studs for semiconductor structures |
Donna R. Cote, David Stanasolovich |
1994-10-04 |
| 5263824 |
Remote controlled shutdown for hazardous material transport vehicle |
Fred J. Waldbeser |
1993-11-23 |
| 5216282 |
Self-aligned contact studs for semiconductor structures |
Donna R. Cote, David Stanasolovich |
1993-06-01 |
| 5187121 |
Process for fabrication of a semiconductor structure and contact stud |
Donna R. Cote, David Stanasolovich |
1993-02-16 |
| 5166096 |
Process for fabricating self-aligned contact studs for semiconductor structures |
Donna R. Cote, David Stanasolovich |
1992-11-24 |
