Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7332054 | Etch apparatus | Arne Ballantine, Scott A. Estes, Emily E. Fisch, Gary L. Milo | 2008-02-19 |
| 6759260 | Metal oxide temperature monitor | Arne Ballantine, Edward C. Cooney, III, Jeffrey D. Gilbert, Robert G. Miller, Amy L. Myrick | 2004-07-06 |
| 6699400 | Etch process and apparatus therefor | Arne Ballantine, Scott A. Estes, Emily E. Fisch, Gary L. Milo | 2004-03-02 |
| 6580140 | Metal oxide temperature monitor | Arne Ballantine, Edward C. Cooney, III, Jeffrey D. Gilbert, Robert G. Miller, Amy L. Myrick | 2003-06-17 |
| 6339022 | Method of annealing copper metallurgy | Arne Ballantine, Edward C. Cooney, III, George A. Dunbar, III, Cheryl G. Faltermeier, Jeffrey D. Gilbert +9 more | 2002-01-15 |
| 6282459 | Structure and method for detection of physical interference during transport of an article | Arne Ballantine, Emily E. Fisch | 2001-08-28 |
| 6105274 | Cryogenic/phase change cooling for rapid thermal process systems | Arne Ballantine | 2000-08-22 |
| 6036821 | Enhanced collimated sputtering apparatus and its method of use | — | 2000-03-14 |
| 5982225 | Hot electron compensation for improved MOS transistor reliability | Timothy E. Forhan, Terence B. Hook, Steven W. Mittl, Edward J. Nowak, Madhu Sayala | 1999-11-09 |
| 5947053 | Wear-through detector for multilayered parts and methods of using same | Jay Burnham, Harold G. Linde, Nicholas Mone, Jr. | 1999-09-07 |
| 5943594 | Method for extended ion implanter source lifetime with control mechanism | Michael Bailey | 1999-08-24 |
| 5940724 | Method for extended ion implanter source lifetime | — | 1999-08-17 |
| 5579792 | Apparatus for uniform cleaning of wafers using megasonic energy | David Stanasolovich, William A. Syverson | 1996-12-03 |
| 5539080 | Polyimide and a semiconductor prepared therefrom | Dennis P. Hogan, Harold G. Linde | 1996-07-23 |
| 5536792 | Antireflective polymide dielectric for photolithography | Dennis P. Hogan, Harold G. Linde | 1996-07-16 |
| 5533540 | Apparatus for uniform cleaning of wafers using megasonic energy | David Stanasolovich, William A. Syverson | 1996-07-09 |
| 5441797 | Antireflective polyimide dielectric for photolithography | Dennis P. Hogan, Harold G. Linde | 1995-08-15 |
| 5427622 | Method for uniform cleaning of wafers using megasonic energy | David Stanasolovich, William A. Syverson | 1995-06-27 |
| 5397684 | Antireflective polyimide dielectric for photolithography | Dennis P. Hogan, Harold G. Linde | 1995-03-14 |
| 5352927 | Self-aligned contact studs for semiconductor structures | Donna R. Cote, David Stanasolovich | 1994-10-04 |
| 5263824 | Remote controlled shutdown for hazardous material transport vehicle | Fred J. Waldbeser | 1993-11-23 |
| 5216282 | Self-aligned contact studs for semiconductor structures | Donna R. Cote, David Stanasolovich | 1993-06-01 |
| 5187121 | Process for fabrication of a semiconductor structure and contact stud | Donna R. Cote, David Stanasolovich | 1993-02-16 |
| 5166096 | Process for fabricating self-aligned contact studs for semiconductor structures | Donna R. Cote, David Stanasolovich | 1992-11-24 |