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Electrode for phase change memory device and method |
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2008-11-25 |
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Method of fabricating micro-electromechanical switches on CMOS compatible substrates |
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Method of fabricating micro-electromechanical switches on CMOS compatible substrates |
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2003-10-21 |
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Low temperature/low dopant oxide glass film |
Son V. Nguyen, Christopher J. Waskiewicz |
2002-12-03 |
| 6483172 |
Semiconductor device structure with hydrogen-rich layer for facilitating passivation of surface states |
William J. Cote, Son V. Nguyen, Markus Kirchhoff, Max G. Levy, Manfred Hauf |
2002-11-19 |
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Manufacturing of cavity fuses on gate conductor level |
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Adhesion of silicon carbide films |
Daniel C. Edelstein, John A. Fitzsimmons, Thomas Ivers, Paul C. Jamison, Ernest N. Levine |
2001-06-26 |
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Methods and apparatus for filling high aspect ratio structures with silicate glass |
Ashima B. Chakravarti, Richard A. Conti, Frank V. Liucci, Son V. Nguyen |
2000-06-20 |
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Process for reducing circuit damage during PECVD in single wafer PECVD system |
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1999-07-20 |
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Flowable spin-on insulator |
Son V. Nguyen |
1999-01-05 |
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Process for the elimination of tungsten oxidation with inert gas stabilization in chemical vapor deposition processes |
William J. Cote, Donna D. Miura, Christopher J. Waskiewicz |
1998-05-19 |
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Self-aligned contact studs for semiconductor structures |
David Stanasolovich, Ronald A. Warren |
1994-10-04 |
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Selective etching process for boron nitride films |
David M. Dobuzinsky, Son V. Nguyen |
1993-06-08 |
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Self-aligned contact studs for semiconductor structures |
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1993-06-01 |
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Process for fabrication of a semiconductor structure and contact stud |
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1993-02-16 |
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Process for fabricating self-aligned contact studs for semiconductor structures |
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1992-11-24 |
