Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7480990 | Method of making conductor contacts having enhanced reliability | John A. Fitzsimmons, William J. Cote, Nancy Anne Greco, Steven Moskowitz | 2009-01-27 |
| 7034400 | Dual damascene interconnect structure using low stress fluorosilicate insulator with copper conductors | Edward Barth, Glenn A. Biery, Jeffrey P. Gambino, Hyun Koo Lee, Ernest N. Levine +2 more | 2006-04-25 |
| 6939797 | Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof | Edward Barth, John A. Fitzsimmons, Stephen M. Gates, Sarah L. Lane, Jia Lee +3 more | 2005-09-06 |
| 6821890 | Method for improving adhesion to copper | Vincent J. McGahay, Joyce C. Liu, Henry A. Nye, III | 2004-11-23 |
| 6737747 | Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof | Edward Barth, John A. Fitzsimmons, Stephen M. Gates, Sarah L. Lane, Jia Lee +3 more | 2004-05-18 |
| 6726996 | Laminated diffusion barrier | Edward Barth, Stephan A. Cohen, Chester T. Dziobkowski, John A. Fitzsimmons, Stephen M. Gates +3 more | 2004-04-27 |
| 6626188 | Method for cleaning and preconditioning a chemical vapor deposition chamber dome | John A. Fitzsimmons, Pavel Smetana | 2003-09-30 |
| 6500772 | Methods and materials for depositing films on semiconductor substrates | Ashima B. Chakravarti, Richard A. Conti, Chester T. Dziobkowski, Paul C. Jamison, Frank V. Liucci | 2002-12-31 |
| 6335261 | Directional CVD process with optimized etchback | Wesley C. Natzle, Richard A. Conti, Laertis Economikos, George D. Papasouliotis | 2002-01-01 |
| 6271595 | Method for improving adhesion to copper | Vincent J. McGahay, Joyce C. Liu, Henry A. Nye, III | 2001-08-07 |
| 6252295 | Adhesion of silicon carbide films | Donna R. Cote, Daniel C. Edelstein, John A. Fitzsimmons, Paul C. Jamison, Ernest N. Levine | 2001-06-26 |