Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329612 | Semiconductor device and process for producing the same | Yuhko Nishimoto, Kazuo Maeda | 2008-02-12 |
| 7238629 | Deposition method, method of manufacturing semiconductor device, and semiconductor device | Kazuo Maeda | 2007-07-03 |
| 7132171 | Low dielectric constant insulating film and method of forming the same | Toshiyuki Ohdaira | 2006-11-07 |
| 6911405 | Semiconductor device and method of manufacturing the same | Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Youichi Yamamoto, Yuichiro Kotake +2 more | 2005-06-28 |
| 6852651 | Semiconductor device and method of manufacturing the same | Yuichiro Kotake, Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda | 2005-02-08 |
| 6815824 | Semiconductor device and method of manufacturing the same | Yuhko Nishimoto, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura | 2004-11-09 |
| 6780790 | Semiconductor device and method of manufacturing the same | Yuhko Nishimoto, Tomomi Suzuki, Kazuo Maeda | 2004-08-24 |
| 6713383 | Semiconductor device manufacturing method | Yuhko Nishimoto, Tomomi Suzuki, Shoji Ohgawara, Kazuo Maeda | 2004-03-30 |
| 6673725 | Semiconductor device and method of manufacturing the same | Kouichi Ohira, Kazuo Maeda | 2004-01-06 |
| 6649495 | Manufacturing method of semiconductor device | Yuhko Nishimoto, Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda | 2003-11-18 |
| 6645883 | Film forming method, semiconductor device and manufacturing method of the same | Youichi Yamamoto, Hiroshi Ikakura, Tomomi Suzuki, Yuichiro Kotake, Kouichi Ohira +2 more | 2003-11-11 |
| 6642157 | Film forming method and semiconductor device | Yuichiro Kotake, Youichi Yamamoto, Tomomi Suzuki, Hiroshi Ikakura, Shoji Ohgawara +2 more | 2003-11-04 |
| 6630412 | Semiconductor device and method of manufacturing the same | Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto | 2003-10-07 |
| 6514855 | Semiconductor device manufacturing method having a porous insulating film | Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda, Koichi Ohira | 2003-02-04 |
| 6479408 | Semiconductor device and method of manufacturing the same | Kouichi Ohira, Kazuo Maeda | 2002-11-12 |
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto +3 more | 2002-11-12 |
| 6472334 | Film forming method, semiconductor device manufacturing method, and semiconductor device | Hiroshi Ikakura, Tomomi Suzuki, Kazuo Maeda, Kouichi Ohira | 2002-10-29 |
| 4906593 | Method of producing a contact plug | Yuji Furumura, Yasushi Ohyama, Shin-ichi Inoue, Tsutomu Ogawa, Kiyoshi Watanabe +1 more | 1990-03-06 |
| 4804560 | Method of selectively depositing tungsten upon a semiconductor substrate | Yasushi Oyama, Norihisa Tsuzuki, Mamoru Maeda, Masaaki Ichikawa, Fumitake Mieno +6 more | 1989-02-14 |
| 4625678 | Apparatus for plasma chemical vapor deposition | Mamoru Maeda, Yasushi Ohyama, Mikio Takagi | 1986-12-02 |
| 4513026 | Method for coating a semiconductor device with a phosphosilicate glass | Hidekazu Miyamoto, Mamoru Maeda, Mikio Takagi | 1985-04-23 |
| 4487787 | Method of growing silicate glass layers employing chemical vapor deposition process | Mikio Takagi | 1984-12-11 |
| 4406053 | Process for manufacturing a semiconductor device having a non-porous passivation layer | Kanetake Takasaki | 1983-09-27 |
| 4394401 | Method of plasma enhanced chemical vapor deposition of phosphosilicate glass film | Mamoru Maeda, Kanetake Takasaki, Mikio Takagi | 1983-07-19 |