Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8178837 | Logical CAD navigation for device characteristics evaluation system | Tohru Ando, Tsutomu Saito, Yasuhiko Nara, Koichi Takauchi | 2012-05-15 |
| 8097541 | Method for surface treating semiconductor | Seiichi Takahashi, Hiroaki Inoue, Masayuki Satou, Yutaka Miura | 2012-01-17 |
| 8007964 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata +2 more | 2011-08-30 |
| 7700916 | Logical CAD navigation for device characteristics evaluation system | Tohru Ando, Tsutomu Saito, Yasuhiko Nara, Koichi Takauchi | 2010-04-20 |
| 7691546 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata +2 more | 2010-04-06 |
| 7618753 | Photomask blank, photomask and method for producing those | Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Satoshi Okazaki, Takashi Haraguchi +3 more | 2009-11-17 |
| 7556892 | Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method | Kimihiro Okada, Masahide Iwakata, Takashi Haraguchi, Yuichi Fukushima, Hiroki Yoshikawa +4 more | 2009-07-07 |
| 6869500 | Method for processing a wafer and apparatus for performing the same | Kwang-Myung Lee, Jae-Hyuk An, Seung-Ki Chae, Jea-Wook Kim | 2005-03-22 |
| 6867147 | Method of surface treatment of semiconductor | — | 2005-03-15 |
| 6793734 | Heating furnace and semiconductor wafer-holding jig assembly and process of manufacturing semiconductor devices | — | 2004-09-21 |
| 6686259 | Method for manufacturing solid state image pick-up device | Sang-Sik Park, Jae-heon Choi, Sang-Il Jung, Jun Taek Lee | 2004-02-03 |
| 6248672 | Method of producing a semiconductor device in a heating furnace having a reaction tube with a temperature-equalizing zone | — | 2001-06-19 |
| 6204194 | Method and apparatus for producing a semiconductor device | — | 2001-03-20 |
| 6159873 | Method for producing semiconductor device and production apparatus of semiconductor device | — | 2000-12-12 |
| 6077573 | Plasma enhanced chemical vapor deposition methods of forming hemispherical grained silicon layers | Young Sun Kim, Sang-Hyeop Lee, Seung Hwan Lee, Young-Wook Park | 2000-06-20 |
| 5972116 | Method and apparatus for producing a semiconductor device | — | 1999-10-26 |
| 5643839 | Method for producing semiconductor device | — | 1997-07-01 |
| 5445676 | Method and apparatus for manufacturing semiconductor devices | — | 1995-08-29 |
| 5407485 | Apparatus for producing semiconductor device and method for producing semiconductor device | — | 1995-04-18 |
| 5387557 | Method for manufacturing semiconductor devices using heat-treatment vertical reactor with temperature zones | — | 1995-02-07 |
| 5209847 | Ultrathin membrane of polymethacrylate or polycrotonate and device provided with ultrathin membrane | Norihiro Kaiya, Naoyuki Amaya, Yoshishige Murata, Kazuichi Tsuda, Kiyotaka Shigehara +2 more | 1993-05-11 |
| 4625678 | Apparatus for plasma chemical vapor deposition | Yoshimi Shioya, Mamoru Maeda, Yasushi Ohyama | 1986-12-02 |
| 4581622 | UV erasable EPROM with UV transparent silicon oxynitride coating | Kanetake Takasaki, Kenji Koyama | 1986-04-08 |
| 4539068 | Vapor phase growth method | Kanetake Takasaki, Kenji Koyama | 1985-09-03 |
| 4532022 | Process of producing a semiconductor device | Kanetake Takasaki, Kenji Koyama | 1985-07-30 |