Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386260 | Radiation-sensitive resin composition, method of forming resist pattern, polymer, and compound | Ryuichi NEMOTO, Taiichi Furukawa | 2025-08-12 |
| 11535569 | Method for manufacturing sensor element | Masaki Mizutani, Ai Igarashi | 2022-12-27 |
| 11320735 | Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, carboxylic acid salt and carboxylic acid | Katsuaki NISHIKORI | 2022-05-03 |
| 10247698 | Gas sensor element, gas sensor, and method for manufacturing gas sensor element | Ai Igarashi | 2019-04-02 |
| 10145816 | Gas sensor element, gas sensor, and method of manufacturing gas sensor element | Takashi Konno, Masaki Nakagawa, Haruhiko Shigeta | 2018-12-04 |
| 10012611 | Gas sensor element and gas sensor | Yuta Oishi, Seiji Oya | 2018-07-03 |
| 9976979 | Gas sensor element, gas sensor, and method of manufacturing gas sensor element | Akinori Kojima, Masaki Mizutani, Nobuo Furuta, Ai Igarashi | 2018-05-22 |
| 9739748 | Gas sensor and gas detection element | Seiji Oya, Yuta Oishi | 2017-08-22 |
| 8012654 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-09-06 |
| 8007964 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Masahide Iwakata, Mikio Takagi +2 more | 2011-08-30 |
| 8003284 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-08-23 |
| 7989124 | Photomask blank and photomask making method | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-08-02 |
| 7790339 | Photomask blank | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yuichi Fukushima | 2010-09-07 |
| 7771893 | Photomask blank, photomask and fabrication method thereof | Hiroki Yoshikawa, Hiroshi Kubota, Yoshinori Kinase, Tamotsu Maruyama, Takashi Haraguchi +3 more | 2010-08-10 |
| 7767366 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2010-08-03 |
| 7767367 | Photomask blank and photomask making method | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2010-08-03 |
| 7736824 | Photomask blank, photomask, and method of manufacture | Hiroki Yoshikawa, Yukio Inazuki, Noriyasu Fukushima, Hideo Kaneko | 2010-06-15 |
| 7691546 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Takashi Haraguchi, Masahide Iwakata, Mikio Takagi +2 more | 2010-04-06 |
| 7625677 | Half-tone stacked film, photomask-blank, photomask and fabrication method thereof | Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Motohiko Morita, Tadashi Saga | 2009-12-01 |
| 7625676 | Photomask blank, photomask and fabrication method thereof | Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Takashi Haraguchi, Masahide Iwakata +1 more | 2009-12-01 |
| 7622228 | Halftone phase shift mask blank, and method of manufacture | Toshinobu Ishihara | 2009-11-24 |
| 7622227 | Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof | Yukio Inazuki, Hiroki Yoshikawa, Tamotsu Maruyama | 2009-11-24 |
| 7618753 | Photomask blank, photomask and method for producing those | Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Takashi Haraguchi, Masahide Iwakata +3 more | 2009-11-17 |
| 7598004 | Film-depositing target and preparation of phase shift mask blank | Hiroki Yoshikawa, Toshinobu Ishihara, Yukio Inazuki, Tadashi Saga, Kimihiro Okada +3 more | 2009-10-06 |
| 7556892 | Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method | Kimihiro Okada, Masahide Iwakata, Takashi Haraguchi, Mikio Takagi, Yuichi Fukushima +4 more | 2009-07-07 |