Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372869 | Method for forming resist pattern and radiation-sensitive resin composition | Kazuki Kasahara, Sosuke Osawa, Miki Tamada, Motohiro SHIRATANI | 2025-07-29 |
| 12259653 | Radiation-sensitive resin composition, method of forming resist pattern, and compound | — | 2025-03-25 |
| 12092957 | Radiation-sensitive resin composition, method for forming resist pattern and compound | Kazuya KIRIYAMA, Takuhiro Taniguchi, Ryuichi NEMOTO, Ken MARUYAMA | 2024-09-17 |
| 11966161 | Radiation-sensitive resin composition, method of forming resist pattern, and compound | Takuhiro Taniguchi, Hayato Namai, Kazuya KIRIYAMA, Ken MARUYAMA | 2024-04-23 |
| 11609495 | Radiation-sensitive resin composition and resist pattern-forming method | Kazuya KIRIYAMA, Takuhiro Taniguchi, Ken MARUYAMA | 2023-03-21 |
| 11592746 | Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid | Kazuya KIRIYAMA, Takuhiro Taniguchi, Ken MARUYAMA | 2023-02-28 |
| 11320735 | Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, carboxylic acid salt and carboxylic acid | Satoshi Okazaki | 2022-05-03 |
| 11281100 | Radiation-sensitive resin composition, onium salt compound and method for forming resist pattern | — | 2022-03-22 |
| 10824073 | Radiation-sensitive resin composition and resist pattern-forming method | Hayato Namai | 2020-11-03 |