Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422748 | Radiation-sensitive resin composition and method for forming resist pattern | — | 2025-09-23 |
| 12092957 | Radiation-sensitive resin composition, method for forming resist pattern and compound | Kazuya KIRIYAMA, Katsuaki NISHIKORI, Takuhiro Taniguchi, Ryuichi NEMOTO | 2024-09-17 |
| 11966161 | Radiation-sensitive resin composition, method of forming resist pattern, and compound | Takuhiro Taniguchi, Katsuaki NISHIKORI, Hayato Namai, Kazuya KIRIYAMA | 2024-04-23 |
| 11747725 | Radiation-sensitive resin composition and method for forming resist pattern | — | 2023-09-05 |
| 11745216 | Method for producing film | Ryo KUMEGAWA, Sosuke Osawa, Miki Tamada, Motohiro SHIRATANI | 2023-09-05 |
| 11609495 | Radiation-sensitive resin composition and resist pattern-forming method | Katsuaki NISHIKORI, Kazuya KIRIYAMA, Takuhiro Taniguchi | 2023-03-21 |
| 11592746 | Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid | Kazuya KIRIYAMA, Katsuaki NISHIKORI, Takuhiro Taniguchi | 2023-02-28 |
| 11319388 | Radiation-sensitive resin composition, production method thereof, and resist pattern-forming method | Yoshiki Nonoyama, Takuo Sone, Motohiro SHIRATANI | 2022-05-03 |
| 11204552 | Radiation-sensitive composition, pattern-forming method and radiation-sensitive acid generating agent | Tomoki Nagai, Takehiko Naruoka, Motohiro SHIRATANI, Hisashi Nakagawa | 2021-12-21 |
| 10216090 | Pattern-forming method and composition for resist pattern-refinement | Kanako MEYA, Yusuke Anno, Shuto MORI | 2019-02-26 |
| 9304393 | Radiation-sensitive resin composition and compound | Kazuo Nakahara | 2016-04-05 |
| 9261789 | Liquid immersion lithography upper-layer film-forming composition and photoresist pattern-forming method | Takahiro Hayama, Kazunori Kusabiraki, Yukio Nishimura, Kiyoshi Tanaka | 2016-02-16 |
| 9200098 | Radiation-sensitive composition and compound | — | 2015-12-01 |
| 9128370 | Radiation-sensitive composition and compound | — | 2015-09-08 |
| 9120726 | Radiation-sensitive resin composition, compound and producing method of compound | — | 2015-09-01 |
| 9122154 | Radiation-sensitive resin composition, and radiation-sensitive acid generating agent | — | 2015-09-01 |
| 9104102 | Radiation-sensitive resin composition | Yasuhiko Matsuda, Takanori Kawakami, Kazuki Kasahara | 2015-08-11 |
| 9052600 | Method for forming resist pattern and composition for forming protective film | Koji Inukai | 2015-06-09 |
| 9023584 | Radiation-sensitive composition, and compound | — | 2015-05-05 |
| 8968980 | Radiation-sensitive resin composition and compound | Kota Nishino, Kazuki Kasahara, Hirokazu Sakakibara | 2015-03-03 |
| 8889335 | Radiation-sensitive resin composition | — | 2014-11-18 |
| 8889336 | Radiation-sensitive resin composition and radiation-sensitive acid generating agent | — | 2014-11-18 |
| 8809476 | Polymer | Toshiyuki Kai | 2014-08-19 |
| 8632945 | Radiation-sensitive resin composition, monomer, polymer, and production method of radiation-sensitive resin composition | — | 2014-01-21 |
| 8470513 | Radiation-sensitive resin composition and polymer | Kota Nishino, Daisuke Shimizu, Toshiyuki Kai | 2013-06-25 |