Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372869 | Method for forming resist pattern and radiation-sensitive resin composition | Katsuaki NISHIKORI, Sosuke Osawa, Miki Tamada, Motohiro SHIRATANI | 2025-07-29 |
| 10120277 | Radiation-sensitive composition and pattern-forming method | Vasiliki Kosma, Jérémy Odent, Hong Xu, Mufei Yu, Emmanuel P. Giannelis +1 more | 2018-11-06 |
| 10108088 | Radiation-sensitive composition and pattern-forming method | — | 2018-10-23 |
| 10048586 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Yuusuke Asano, Mitsuo Sato, Hiromitsu Nakashima, Yoshifumi Oizumi, Masafumi Hori +3 more | 2018-08-14 |
| 9513548 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Yuusuke Asano, Mitsuo Satou, Hiromitsu Nakashima, Yoshifumi Oizumi, Masafumi Hori +3 more | 2016-12-06 |
| 9329474 | Photoresist composition and resist pattern-forming method | Norihiko Ikeda | 2016-05-03 |
| 9158196 | Radiation-sensitive resin composition and pattern-forming method | Hiromitsu Nakashima, Masafumi Hori, Masafumi Yoshida | 2015-10-13 |
| 9104102 | Radiation-sensitive resin composition | Yasuhiko Matsuda, Takanori Kawakami, Ken MARUYAMA | 2015-08-11 |
| 9046765 | Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film | Hiromitsu Nakashima, Toru Kimura, Yusuke Asano, Masafumi Hori, Reiko Kimura +2 more | 2015-06-02 |
| 8968980 | Radiation-sensitive resin composition and compound | Ken MARUYAMA, Kota Nishino, Hirokazu Sakakibara | 2015-03-03 |
| 8728706 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Yuusuke Asano, Mitsuo Satou, Hiromitsu Nakashima, Yoshifumi Oizumi, Masafumi Hori +3 more | 2014-05-20 |
| 8609319 | Radiation-sensitive resin composition and resist film formed using the same | Toru Kimura, Hiromitsu Nakashima, Reiko Kimura, Masafumi Hori, Masafumi Yoshida | 2013-12-17 |