Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048586 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Mitsuo Sato, Hiromitsu Nakashima, Kazuki Kasahara, Yoshifumi Oizumi, Masafumi Hori +3 more | 2018-08-14 |
| 9513548 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Mitsuo Satou, Hiromitsu Nakashima, Kazuki Kasahara, Yoshifumi Oizumi, Masafumi Hori +3 more | 2016-12-06 |
| 8728706 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Mitsuo Satou, Hiromitsu Nakashima, Kazuki Kasahara, Yoshifumi Oizumi, Masafumi Hori +3 more | 2014-05-20 |
| 8697331 | Compound, polymer, and radiation-sensitive composition | Hirokazu Sakakibara, Takehiko Naruoka, Makoto Shimizu, Yukio Nishimura, Nobuji Matsumura | 2014-04-15 |
| 8535871 | Radiation-sensitive resin composition, method for forming a resist pattern, compound, and polymer | Takanori Kawakami | 2013-09-17 |
| 8530692 | Compound, fluorine-containing polymer, radiation-sensitive resin composition and method for producing compound | Nobuji Matsumura, Hirokazu Sakakibara, Yukio Nishimura, Takehiko Naruoka | 2013-09-10 |