Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9170488 | Resist pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Taiichi Furukawa, Masafumi Hori | 2015-10-27 |
| 9164387 | Pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Masafumi Hori, Koji Ito, Taiichi Furukawa | 2015-10-20 |
| 9046765 | Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film | Hiromitsu Nakashima, Toru Kimura, Yusuke Asano, Masafumi Hori, Kazuki Kasahara +2 more | 2015-06-02 |
| 8795954 | Resist pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Taiichi Furukawa, Masafumi Hori | 2014-08-05 |
| 8609318 | Radiation-sensitive resin composition, method for forming resist pattern and polymer | Kazuo Nakahara, Hiromitsu Nakashima | 2013-12-17 |
| 8609319 | Radiation-sensitive resin composition and resist film formed using the same | Toru Kimura, Hiromitsu Nakashima, Kazuki Kasahara, Masafumi Hori, Masafumi Yoshida | 2013-12-17 |
| 8609321 | Radiation-sensitive resin composition, polymer and compound | Hiromitsu Nakashima, Kazuo Nakahara, Mitsuo Sato | 2013-12-17 |