Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386260 | Radiation-sensitive resin composition, method of forming resist pattern, polymer, and compound | Ryuichi NEMOTO, Satoshi Okazaki | 2025-08-12 |
| 11687003 | Negative resist pattern-forming method, and composition for upper layer film formation | Sosuke Osawa | 2023-06-27 |
| 10073344 | Negative resist pattern-forming method, and composition for upper layer film formation | Sosuke Osawa | 2018-09-11 |
| 10025188 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2018-07-17 |
| 9335630 | Pattern-forming method, and radiation-sensitive composition | Hirokazu Sakakibara, Masafumi Hori, Koji Ito | 2016-05-10 |
| 9229323 | Pattern-forming method | Hirokazu Sakakibara, Hiromu MIYATA, Koji Ito | 2016-01-05 |
| 9223207 | Resist pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Masafumi Hori, Koji Ito, Hiromu MIYATA | 2015-12-29 |
| 9170488 | Resist pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Reiko Kimura, Masafumi Hori | 2015-10-27 |
| 9164387 | Pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Masafumi Hori, Koji Ito, Reiko Kimura | 2015-10-20 |
| 9034559 | Pattern-forming method, and radiation-sensitive composition | Hirokazu Sakakibara, Masafumi Hori, Koji Ito | 2015-05-19 |
| 8993223 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2015-03-31 |
| 8980539 | Developer | Hirokazu Sakakibara | 2015-03-17 |
| 8822140 | Resist pattern-forming method | Hirokazu Sakakibara, Hiromu MIYATA, Koji Ito | 2014-09-02 |
| 8815493 | Resist pattern-forming method, and radiation-sensitive resin composition | Koji Ito, Hirokazu Sakakibara, Masafumi Hori | 2014-08-26 |
| 8795954 | Resist pattern-forming method, and radiation-sensitive resin composition | Hirokazu Sakakibara, Reiko Kimura, Masafumi Hori | 2014-08-05 |
| 8703401 | Method for forming pattern and developer | Hirokazu Sakakibara | 2014-04-22 |
| 8669042 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2014-03-11 |
| 8530146 | Method for forming resist pattern | Hirokazu Sakakibara, Hiromu MIYATA, Koji Ito | 2013-09-10 |
| 8168109 | Stabilizers for vinyl ether resist formulations for imprint lithography | Frances Anne Houle, Sally A. Swanson | 2012-05-01 |
| 8168691 | Vinyl ether resist formulations for imprint lithography and processes of use | Frances Anne Houle | 2012-05-01 |