Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312487 | Method for forming protective film, method for manufacturing patterned substrate, and composition | Hiroyuki Miyauchi, Nao OKUMURA, Tomoharu Kawazu, Satoshi Dei | 2025-05-27 |
| 12265333 | Composition, resist underlayer film, method of forming resist underlayer film, method of producing patterned substrate, and compound | Shin-ya Nakafuji, Tomoaki Taniguchi | 2025-04-01 |
| 11667620 | Composition, film, film-forming method and patterned substrate-producing method | Hiroki Nakatsu, Kazunori Sakai, Yuushi MATSUMURA, Hiroki Nakagawa | 2023-06-06 |
| 11454890 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound | Naoya Nosaka, Yuushi MATSUMURA, Hiroki Nakatsu, Hiroki Nakagawa | 2022-09-27 |
| 11215928 | Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate | Hiroki Nakatsu, Kazunori Sakai, Ichihiro Miura | 2022-01-04 |
| 10520814 | Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate | Masayuki Miyake, Goji Wakamatsu, Tsubasa Abe, Kazunori Sakai | 2019-12-31 |
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Shunsuke Kurita, Satoshi Dei, Yoshio Takimoto +1 more | 2018-10-02 |
| 10025188 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Hiromitsu Tanaka +1 more | 2018-07-17 |
| 9891526 | Pattern forming method | Shunsuke Kurita, Toru Kimura, Yoshio Takimoto | 2018-02-13 |
| 9434609 | Method for forming pattern, and polysiloxane composition | Satoshi Dei, Takashi Mori | 2016-09-06 |
| 9329478 | Polysiloxane composition and pattern-forming method | Yusuke Anno, Takashi Mori, Satoshi Dei, Yushi Matsumura, Shin-ya Minegishi | 2016-05-03 |
| 9170492 | Silicon-containing film-forming composition, silicon-containing film, and pattern forming method | Tomoharu Kawazu, Masato Tanaka, Takashi Mori, Kyoyu Yasuda | 2015-10-27 |
| 9116427 | Composition for forming resist underlayer film and pattern-forming method | Shunsuke Kurita, Hiromitsu Nakashima, Tooru Kimura | 2015-08-25 |
| 8993223 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Hiromitsu Tanaka +1 more | 2015-03-31 |
| 8956807 | Method for forming resist pattern, and composition for forming resist underlayer film | Hiromitsu Tanaka, Shinya Minegishi, Takashi Mori, Tomoaki Seko, Jyunya Suzuki | 2015-02-17 |
| 8927201 | Multilayer resist process pattern-forming method and multilayer resist process inorganic film-forming composition | Yoshio Takimoto, Takashi Mori, Kazuo Nakahara, Masayuki Motonari | 2015-01-06 |
| 8669042 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Hiromitsu Tanaka +1 more | 2014-03-11 |