Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025188 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi +1 more | 2018-07-17 |
| 9447303 | Composition for forming resist underlayer film | Shin-ya Nakafuji, Satoru Murakami, Toru Kimura | 2016-09-20 |
| 9329478 | Polysiloxane composition and pattern-forming method | Yusuke Anno, Takashi Mori, Satoshi Dei, Kazunori Takanashi, Yushi Matsumura | 2016-05-03 |
| 9170493 | Resist underlayer film-forming composition, pattern-forming method and resist underlayer film | Kazuhiko Komura, Shin-ya Nakafuji, Takanori Nakano | 2015-10-27 |
| 9134611 | Composition for forming resist underlayer film and pattern-forming method | Shin-ya Nakafuji, Takanori Nakano | 2015-09-15 |
| 9090119 | Pattern forming method | Shin-ya Nakafuji, Takanori Nakano | 2015-07-28 |
| 9040232 | Method for pattern formation, method and composition for resist underlayer film formation, and resist underlayer film | Shin-ya Nakafuji, Satoru Murakami, Toru Kimura | 2015-05-26 |
| 9029069 | Resist underlayer film-forming composition and method for forming pattern | Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2015-05-12 |
| 8993223 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi +1 more | 2015-03-31 |
| 8871432 | Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film | Satoru Murakami, Yushi Matsumura, Kazuhiko Komura, Yoshio Takimoto, Shin-ya Nakafuji +1 more | 2014-10-28 |
| 8859185 | Resist underlayer film-forming composition | Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2014-10-14 |
| 8715916 | Pattern forming method and resist underlayer film-forming composition | Shin-ya Nakafuji, Takanori Nakano | 2014-05-06 |
| 8669042 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi +1 more | 2014-03-11 |
| 8513133 | Composition for forming resist underlayer film and method for forming pattern | Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2013-08-20 |