Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216090 | Pattern-forming method and composition for resist pattern-refinement | Kanako MEYA, Ken MARUYAMA, Shuto MORI | 2019-02-26 |
| 10025188 | Resist pattern-forming method | Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2018-07-17 |
| 9329478 | Polysiloxane composition and pattern-forming method | Takashi Mori, Satoshi Dei, Kazunori Takanashi, Yushi Matsumura, Shin-ya Minegishi | 2016-05-03 |
| 9046769 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Shinya Minegishi, Satoru Murakami, Shinya Nakafuji, Kazuhiko Komura +1 more | 2015-06-02 |
| 8993223 | Resist pattern-forming method | Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2015-03-31 |
| 8859191 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Shinya Minegishi, Satoru Murakami, Shinya Nakafuji, Kazuhiko Komura +1 more | 2014-10-14 |
| 8669042 | Resist pattern-forming method | Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Kazunori Takanashi, Hiromitsu Tanaka +1 more | 2014-03-11 |
| 8501385 | Positive-type radiation-sensitive composition, and resist pattern formation method | Kouichi Fujiwara, Makoto Sugiura, Gouji Wakamatsu | 2013-08-06 |