Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216090 | Pattern-forming method and composition for resist pattern-refinement | Yusuke Anno, Ken MARUYAMA, Shuto MORI | 2019-02-26 |
| 8927200 | Double patterning method | Takeo Shioya, Motoyuki Shima | 2015-01-06 |