Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506976 | Radiation-sensitive composition and resist pattern-forming method | Hisashi Nakagawa, Yusuke Asano | 2022-11-22 |
| 11079676 | Radiation-sensitive composition, pattern-forming method, and metal-containing resin and production method thereof | Yusuke Asano, Hisashi Nakagawa | 2021-08-03 |
| 10995173 | Composition and pattern-forming method | Yuji Namie, Tomoki Nagai, Takuo Sone | 2021-05-04 |
| 10308752 | Block copolymer | Yuji Namie, Tomoki Nagai, Takuo Sone | 2019-06-04 |
| 10146130 | Composition for base, and directed self-assembly lithography method | Hiroyuki Komatsu, Takehiko Naruoka, Kaori Sakai, Tomoki Nagai | 2018-12-04 |
| 9718950 | Directed self-assembly composition for pattern formation and pattern-forming method | Yuji Namie, Tomoki Nagai | 2017-08-01 |
| 9690192 | Composition for base, and directed self-assembly lithography method | Hiroyuki Komatsu, Takehiko Naruoka, Kaori Sakai, Tomoki Nagai | 2017-06-27 |
| 9684235 | Directed self-assembling composition for pattern formation, and pattern-forming method | Yuji Namie, Tomoki Nagai, Takuo Sone | 2017-06-20 |
| 9607849 | Pattern-forming method and resist underlayer film-forming composition | Kazuhiko Koumura, Takashi Mori, Kyoyu Yasuda, Yoshio Takimoto, Shinya Nakafuji +1 more | 2017-03-28 |
| 9599892 | Composition for pattern formation, and pattern-forming method | Hiroyuki Komatsu, Takehiko Naruoka, Tomoki Nagai | 2017-03-21 |
| 9594303 | Resist pattern-forming method and photoresist composition | Hitoshi Osaki, Hayato Namai | 2017-03-14 |
| 9587065 | Composition for pattern formation, and pattern-forming method | Hiroyuki Komatsu, Takehiko Naruoka, Tomoki Nagai | 2017-03-07 |
| 9557644 | Base film-forming composition, and directed self-assembly lithography method | Hiroyuki Komatsu, Takehiko Naruoka, Kaori Sakai, Tomoki Nagai | 2017-01-31 |
| 9534135 | Composition for pattern formation, and pattern-forming method | Hiroyuki Komatsu, Takehiko Naruoka, Tomoki Nagai | 2017-01-03 |
| 9487868 | Pattern-forming method | Hiroyuki Komatsu, Takehiko Naruoka, Kaori Sakai, Tomoki Nagai | 2016-11-08 |
| 9268225 | Composition, resist pattern-forming method, compound, method for production of compound, and polymer | Kiyoshi Tanaka, Kazunori Kusabiraki, Takahiro Hayama | 2016-02-23 |
| 9046769 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Satoru Murakami, Yusuke Anno, Shinya Nakafuji, Kazuhiko Komura +1 more | 2015-06-02 |
| 9046775 | Composition for forming liquid immersion upper layer film, resist pattern-forming method, polymer, and compound | Kiyoshi Tanaka, Kazunori Kusabiraki | 2015-06-02 |
| 8956807 | Method for forming resist pattern, and composition for forming resist underlayer film | Hiromitsu Tanaka, Kazunori Takanashi, Takashi Mori, Tomoaki Seko, Jyunya Suzuki | 2015-02-17 |
| 8859191 | Pattern-forming method, and composition for forming resist underlayer film | Yushi Matsumura, Satoru Murakami, Yusuke Anno, Shinya Nakafuji, Kazuhiko Komura +1 more | 2014-10-14 |