Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329478 | Polysiloxane composition and pattern-forming method | Yusuke Anno, Takashi Mori, Satoshi Dei, Kazunori Takanashi, Shin-ya Minegishi | 2016-05-03 |
| 9046769 | Pattern-forming method, and composition for forming resist underlayer film | Shinya Minegishi, Satoru Murakami, Yusuke Anno, Shinya Nakafuji, Kazuhiko Komura +1 more | 2015-06-02 |
| 9029069 | Resist underlayer film-forming composition and method for forming pattern | Shin-ya Minegishi, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2015-05-12 |
| 8871432 | Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film | Shin-ya Minegishi, Satoru Murakami, Kazuhiko Komura, Yoshio Takimoto, Shin-ya Nakafuji +1 more | 2014-10-28 |
| 8859185 | Resist underlayer film-forming composition | Shin-ya Minegishi, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2014-10-14 |
| 8859191 | Pattern-forming method, and composition for forming resist underlayer film | Shinya Minegishi, Satoru Murakami, Yusuke Anno, Shinya Nakafuji, Kazuhiko Komura +1 more | 2014-10-14 |
| 8513133 | Composition for forming resist underlayer film and method for forming pattern | Shin-ya Minegishi, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami +2 more | 2013-08-20 |