Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265333 | Composition, resist underlayer film, method of forming resist underlayer film, method of producing patterned substrate, and compound | Tomoaki Taniguchi, Kazunori Takanashi | 2025-04-01 |
| 11880138 | Composition, pattern-forming method, and compound-producing method | Hiroki Nakatsu, Tomoaki Taniguchi, Tomohiro Oda | 2024-01-23 |
| 11126084 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound | Naoya Nosaka, Goji Wakamatsu, Tsubasa Abe, Yuushi MATSUMURA, Yoshio Takimoto +1 more | 2021-09-21 |
| 10146131 | Composition, method for producing patterned substrate, film and forming method thereof, and compound | Fumihiro Toyokawa, Gouji Wakamatsu, Yoshio Takimoto, Katsuhisa MIZOGUCHI, Takashi Okada +3 more | 2018-12-04 |
| 10053539 | Composition for film formation, film, production method of patterned substrate, and compound | Goji Wakamatsu, Tsubasa Abe, Kazunori Sakai | 2018-08-21 |
| 9696626 | Composition for forming a resist underlayer film, and pattern-forming method | Fumihiro Toyokawa, Gouji Wakamatsu | 2017-07-04 |
| 9620378 | Composition for film formation, film, production method of patterned substrate, and compound | Goji Wakamatsu, Tsubasa Abe, Kazunori Sakai | 2017-04-11 |
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Fumihiro Toyokawa, Goji Wakamatsu, Shingo Takasugi, Tooru Kimura | 2017-02-28 |
| 9447303 | Composition for forming resist underlayer film | Shin-ya Minegishi, Satoru Murakami, Toru Kimura | 2016-09-20 |
| 9400429 | Composition for forming a resist underlayer film, and pattern-forming method | Fumihiro Toyokawa, Gouji Wakamatsu | 2016-07-26 |
| 9170493 | Resist underlayer film-forming composition, pattern-forming method and resist underlayer film | Shin-ya Minegishi, Kazuhiko Komura, Takanori Nakano | 2015-10-27 |
| 9134611 | Composition for forming resist underlayer film and pattern-forming method | Shin-ya Minegishi, Takanori Nakano | 2015-09-15 |
| 9091922 | Resin composition, resist underlayer film, resist underlayer film-forming method and pattern-forming method | Satoru Murakami, Kazuhiko Koumura, Yuushi MATSUMURA, Masayuki Motonari, Katsuhisa MIZOGUCHI | 2015-07-28 |
| 9090119 | Pattern forming method | Shin-ya Minegishi, Takanori Nakano | 2015-07-28 |
| 9040232 | Method for pattern formation, method and composition for resist underlayer film formation, and resist underlayer film | Shin-ya Minegishi, Satoru Murakami, Toru Kimura | 2015-05-26 |
| 8871432 | Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film | Shin-ya Minegishi, Satoru Murakami, Yushi Matsumura, Kazuhiko Komura, Yoshio Takimoto +1 more | 2014-10-28 |
| 8715916 | Pattern forming method and resist underlayer film-forming composition | Shin-ya Minegishi, Takanori Nakano | 2014-05-06 |