Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320739 | Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate | Naoya Nosaka, Tsubasa Abe, Kazunori Sakai, Yuushi MATSUMURA, Hayato Namai | 2022-05-03 |
| 11243468 | Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method | Naoya Nosaka, Tsubasa Abe, Ichihiro Miura, Kengo EHARA, Hiroki Nakatsu +1 more | 2022-02-08 |
| 11126084 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound | Naoya Nosaka, Tsubasa Abe, Yuushi MATSUMURA, Yoshio Takimoto, Shin-ya Nakafuji +1 more | 2021-09-21 |
| 10520814 | Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate | Masayuki Miyake, Tsubasa Abe, Kazunori Takanashi, Kazunori Sakai | 2019-12-31 |
| 10423083 | Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate | Kentaro Harada | 2019-09-24 |
| 10078265 | Pattern-forming method, resin, and composition | Shun Aoki, Hiromitsu Tanaka, Yoshio Takimoto, Masayoshi Ishikawa, Toru Kimura | 2018-09-18 |
| 10053539 | Composition for film formation, film, production method of patterned substrate, and compound | Shin-ya Nakafuji, Tsubasa Abe, Kazunori Sakai | 2018-08-21 |
| 9958781 | Method for film formation, and pattern-forming method | Yuushi MATSUMURA, Naoya Nosaka, Tsubasa Abe, Yoshio Takimoto | 2018-05-01 |
| 9620378 | Composition for film formation, film, production method of patterned substrate, and compound | Shin-ya Nakafuji, Tsubasa Abe, Kazunori Sakai | 2017-04-11 |
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Shingo Takasugi, Tooru Kimura | 2017-02-28 |
| 9412593 | Composition for film formation, resist underlayer film, and forming method of resist underlayer film, and pattern-forming method | Hayato Namai | 2016-08-09 |
| 9259668 | Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate | Kentaro Harada | 2016-02-16 |
| 8883023 | Method for forming pattern | Hayato Namai, Syun Aoki | 2014-11-11 |