Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667620 | Composition, film, film-forming method and patterned substrate-producing method | Hiroki Nakatsu, Kazunori Takanashi, Kazunori Sakai, Hiroki Nakagawa | 2023-06-06 |
| 11454890 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound | Naoya Nosaka, Hiroki Nakatsu, Kazunori Takanashi, Hiroki Nakagawa | 2022-09-27 |
| 11320739 | Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate | Goji Wakamatsu, Naoya Nosaka, Tsubasa Abe, Kazunori Sakai, Hayato Namai | 2022-05-03 |
| 11126084 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound | Naoya Nosaka, Goji Wakamatsu, Tsubasa Abe, Yoshio Takimoto, Shin-ya Nakafuji +1 more | 2021-09-21 |
| 11053457 | Cleaning composition for semiconductor substrate | Shun Aoki, Kan-go Chung, Tomohiro Matsuki, Tatsuya Sakai, Kenji Mochida | 2021-07-06 |
| 11003079 | Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound | Naoya Nosaka, Gouji Wakamatsu, Tsubasa Abe, Masayuki Miyake, Yoshio Takimoto | 2021-05-11 |
| 9958781 | Method for film formation, and pattern-forming method | Goji Wakamatsu, Naoya Nosaka, Tsubasa Abe, Yoshio Takimoto | 2018-05-01 |
| 9250526 | Composition for forming resist underlayer film, and pattern-forming method | Tomoaki Seko, Fumihiro Toyokawa, Tooru Kimura | 2016-02-02 |
| 9091922 | Resin composition, resist underlayer film, resist underlayer film-forming method and pattern-forming method | Shin-ya Nakafuji, Satoru Murakami, Kazuhiko Koumura, Masayuki Motonari, Katsuhisa MIZOGUCHI | 2015-07-28 |