Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146131 | Composition, method for producing patterned substrate, film and forming method thereof, and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Gouji Wakamatsu, Yoshio Takimoto, Takashi Okada +3 more | 2018-12-04 |
| 9091922 | Resin composition, resist underlayer film, resist underlayer film-forming method and pattern-forming method | Shin-ya Nakafuji, Satoru Murakami, Kazuhiko Koumura, Yuushi MATSUMURA, Masayuki Motonari | 2015-07-28 |